In order to investigate the response law of different interferometers to the mid-spatial frequency errors and obtain the relatively true power spectral density (PSD) distribution, the 4D AccuFiz, ZYGO DynaFiz and ZYGO GPI interferometers are respectively used to measure the periodic ripples and scratch samples, and the comparative analysis of the measured one-dimension PSD curves is made. The results show that the responsivities to the mid- and high-spatial frequency information are different for different interferometers, and the higher the interferometer resolution is, the higher the responsivity is. The instrument transfer function (ITF) curve is used to correct the measured PSD, and the truer PSD distribution is obtained. However, in the range of some frequency bands, there still exist some difference between the ITF curve and the practical response.

In order to investigate the response law of different interferometers to the mid-spatial frequency errors and obtain the relatively true power spectral density (PSD) distribution, the 4D AccuFiz, ZYGO DynaFiz and ZYGO GPI interferometers are respectively used to measure the periodic ripples and scratch samples, and the comparative analysis of the measured one-dimension PSD curves is made. The results show that the responsivities to the mid- and high-spatial frequency information are different for different interferometers, and the higher the interferometer resolution is, the higher the responsivity is. The instrument transfer function (ITF) curve is used to correct the measured PSD, and the truer PSD distribution is obtained. However, in the range of some frequency bands, there still exist some difference between the ITF curve and the practical response.

介绍了惯性约束聚变系统中米量级光学元件的中低频波面误差检测技术及其研究进展, 包括大口径Fizeau干涉仪直接检测法、瑞奇康芒检测法、斜入射检测法和子孔径拼接检测法。阐述了各种检测方法引入的测量误差及误差消除方法, 对进一步提高波面误差测量精度的必要性和方法进行了展望。

为了研究点衍射干涉仪中针孔的横向离焦与轴向离焦对衍射光的强度与衍射参考波面误差的影响，基于菲涅耳衍射理论，建立了会聚光束经针孔衍射的数学模型，提出了将针孔衍射光的强度与衍射波面误差相结合以分析针孔衍射波前的方法，并综合考虑了会聚光束F 数、针孔直径等参数的影响。研究表明：会聚光束F 数越大，衍射光强度与波面误差越小；横向离焦的距离应小于艾里斑半径与针孔半径之差；横向离焦的允许范围与波长和F 数成正相关，与针孔直径成负相关；当光束F=10 时，在0~35 mm 横向离焦范围内，直径1 mm 以内的针孔可以全程满足波面误差峰谷(PV)值优于0.1λ 的要求；可以通过调整轴向离焦来调整参考光的强度，并且针孔直径越小调整越灵敏；选择直径小于艾里斑半径的针孔可以保证衍射波前误差PV 值优于10-2 λ ，测试光的强度控制在针孔有效衍射光强的1/10附近。仿真结果为设计点衍射干涉仪和分析其精度提供了理论和数据参考。

采用光纤点光源的光学干涉实验与检测系统，需要的光学元件最少，具有最好的环境与机械稳定性，并以最简单的方法获得高精度的基准球面波，可最大限度地减少非平面检测的系统误差。为此，全面分析了影响光纤点光源品质的诸多因素，应用光纤光波传输的基本理论，提出了提高光纤点光源性能的简易方法，并采用数字全息的方法，对两个光纤点光源产生的球面波的干涉图进行计算分析，实现了对光纤点光源球面波的评价。结果表明，由光纤点光源所产生的球面波可以满足一般干涉检测对基准球面波精度的要求。

相移点衍射干涉仪中参考球面波的质量取决于小孔的直径、圆度和厚度，其中小孔的直径是最主要的因素，在实际加工前，需给出小孔直径的要求。基于矢量衍射理论，分析计算了三维结构小孔的衍射。分析了在均匀的TE偏振光和TM偏振光入射情况下，小孔直径大小对衍射波面质量的影响。入射光的线性偏振，给衍射波面中引入了像散和彗差。分析计算得出，为了获得数值孔径(NA)为0.1，相对于理想球面波的均方根(RMS)偏差不大于0.005 λ(λ=13.55 nm)，强度均匀性为0.4的参考球面波，对90 nm厚的小孔选择直径大小为70 nm较为适宜。

针孔或光纤直径的大小是影响点衍射干涉仪检测精度的重要因素, 在实际检测中须根据检测任务的精度要求来选择小孔的尺寸。基于标量衍射理论, 仿真计算了小孔尺寸引起的衍射波面相对标准球面偏离的误差。结果表明, 当小孔直径为2.5 μm, 数值孔径(NA)为0.3时, 与小孔有关的光学系统误差峰值(PV)约为0.07 nm。仿真方法和计算结果为针对各种高精度面形检测任务而设计点衍射干涉仪和分析其精度提供了理论和数据参考。