压电与声光, 2023, 45 (1): 18, 网络出版: 2023-04-07
高品质因数薄膜体声波谐振器的仿真与制备
Simulation and Preparation of Thin Film Bulk Acoustic Resonator with High Quality Factor
补充材料
赵利帅, 衣新燕, 欧阳佩东, 张铁林, 刘红斌, 李国强. 高品质因数薄膜体声波谐振器的仿真与制备[J]. 压电与声光, 2023, 45(1): 18. ZHAO Lishuai, YI Xinyan, OUYANG Peidong, ZHANG Tielin, LIU Hongbin, LI Guoqiang. Simulation and Preparation of Thin Film Bulk Acoustic Resonator with High Quality Factor[J]. Piezoelectrics & Acoustooptics, 2023, 45(1): 18.