光学学报, 2022, 42 (17): 1712004, 网络出版: 2022-09-16
高功率激光光学元件超精密制造技术 
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Ultra-Precision Manufacturing Technology of High Power Laser Optics
图 & 表
图 2. 大口径光学非球面元件超精密磨削机床
Fig. 2. Ultra-precision grinding machine for large aperture aspheric optics
图 3. 圆弧金刚石砂轮对滚研磨修整［12］。（a）修整原理；（b）修整设备
Fig. 3. Dressing arc diamond wheel by roll abrading[12]. (a) Principle of dressing; (b) dressing equipment
图 4. 金刚石砂轮三维形状误差在位检测和评价［13］。（a）三维形状误差在位检测原理；（b）三维轮廓误差；（c）圆度误差
Fig. 4. In-situ measurement and evaluation of 3D shape error of diamond wheel[13]. (a) Principle of in-situ measurement of 3D shape error; (b) 3D outline error; (c) roundness error
图 5. 非球面面形在位检测和补偿［5，14］。（a）在位检测轨迹；（b）在位检测实物图；（c）补偿加工原理
Fig. 5. In-situ measurement and compensation of aspheric surface shape[5,14]. (a) Trajectory of in-situ measurement; (b) physical image of in-situ detection; (c) compensation process principle
图 7. 平面快速抛光原理图与实物图。（a）原理图；（b）实物图
Fig. 7. Schematic figure and physical picture of plane rapid polishing. (a) Principle diagram; (b) physical picture
图 8. 平面快抛加工结果。（a）表面粗糙度（RMS为0.42 nm）；（b）最优面形精度（PV为0.24λ）
Fig. 8. Plane rapid polishing results. (a) Surface roughness (RMS is 0.42 nm); (b) optimal profile accuracy (PV is 0.24λ)
图 9. 离轴非球面镜气囊抛光实物图与原理图。（a）实物图；（b）原理图
Fig. 9. Bonnet polishing picture and principle for off-axis aspheric lens. (a) Bonnet polishing picture; (b) principle diagram
图 10. 系列化气囊工具［23］。（a）工具实物；（b）工具结构设计与仿真
Fig. 10. Serialization of bonnet tools[23]. (a) Tool picture; (b) tool structure design and simulation
图 11. 气囊修整实物与数学模型［26］。（a）气囊修整实物；（b）气囊修整数学模型
Fig. 11. Bonnet dressing picture and mathematical model[26]. (a) Bonnet dressing picture; (b) bonnet dressing mathematical model
图 12. 非球面透镜气囊抛光结果。（a）初始面形；（b）保形抛亮面形；（c）快速修抛面形
Fig. 12. Results of aspheric lens by bonnet polishing. (a) Initial surface shape; (b) conformal polishing surface shape; (c) fast correction polishing surface shape
图 14. 全口径环形抛光的运动学模型。（a）运动参量；（b）轨迹弧长
Fig. 14. Kinematics model of full-aperture continuous polishing process. (a) Kinematics; (b) sliding distance
图 15. 抛光盘形状误差的检测方法和检测结果。（a）检测方法；（b）检测结果
Fig. 15. Method and result of measuring the lap shape error. (a) Measuring method; (b) measuring result
图 16. 不同工作时间的沥青盘面钝化状态图像及特征值变化曲线
Fig. 16. Passivation state images and characteristic value change curve of pitch plate for different working time
图 17. Ф5 m全口径确定性环形抛光机床以及元件加工结果。（a）机床照片；（b）元件面形结果
Fig. 17. Ф5 m full aperture deterministic continuous polisher and workpiece surface figure results. (a) Polisher photograph;(b) workpiece surface figure
图 18. 磁流变单元技术及结果。（a）一体化随动式循环系统；（b）磁流变液流量稳定控制；（c）模块化系列抛光头（直径为20~400 mm）；（d）磁流变宽范围加工能力
Fig. 18. Magnetorheological cell technology and results. (a) Integrated follow-up circulating system; (b) stable flow control of magnetorheological fluid; (c) modular series polishing head (diameter is 20-400 mm); (d) wide range magnetorheological processing capability
图 19. 磁流变加工连续相位板。（a）连续相位板设计图；（b）连续相位板加工残差图
Fig. 19. Continuous phase plate processed by magnetorheological method. (a) Designed continuous phase plate; (b) machining residual diagram of continuous phase plate
图 20. 离子束抛光机床及精密修形原理。（a）精密修形原理；（b）离子束抛光机床
Fig. 20. Ion beam polishing machine and its processing principle. (a) Principle of precision shaping; (b) ion beam polishing machine
图 21. 自适应步长轨迹段划分算法示意图［54］。（a）等步长法；（b）自适应步长法
Fig. 21. Diagrams of adaptive step trajectory segment partition algorithm[54]. (a) Same step size path segment; (b) adaptive step size path segment
图 22. 离子束加工确定性验证实验。（a）原始面形（PV为0.903λ）；（b）仿真结果（PV为0.360λ）；（c）加工结果（PV为0.364λ）
Fig. 22. Deterministic verification experiment for ion beam polishing. (a) Original surface (PV is 0.903λ); (b) simulation result (PV is 0.360λ); (c) processed result (PV is 0.364λ)
图 23. 大口径元件离子束加工结果
Fig. 23. Result of ion beam polishing for large aperture optical elements
图 24. 不同路径方式模拟加工后的残余波纹［26］。（a）光栅路径（RMS为18.134 nm）；（b）同心圆（RMS为18.378 nm）；（c）随机路径（RMS为50.152 nm）
Fig. 24. Contours of residual ripples obtained by three paths[26]. (a) Raster path (RMS is 18.134 nm); (b) circle path (RMS is 18.378 nm); (c) random path (RMS is 50.152 nm)
图 25. 中频误差控制工艺。（a）去除函数稳定性控制［8］；（b）匀滑修正中高频误差［61］
Fig. 25. Control technology for middle frequency error. (a) Removal function stability control[8]; (b) smoothing correction for middle and high frequency errors[61]
图 26. 非球面匀滑结果。（a）430 mm×430 mm非球面元件；（b）中频误差PSD1（RMS为1.67 nm）
Fig. 26. Aspheric smoothing results. (a) 430 mm×430 mm aspheric lens; (b) middle frequency error PSD1 (RMS is 1.67 nm)
图 27. 单点金刚石飞切加工原理及飞切加工机床
Fig. 27. Schematic diagram of single point diamond fly-cutting process and fly-cutting equipment
图 28. 飞切机床动态性能监测平台及仿真模型
Fig. 28. Monitoring platform and simulation model of dynamic performace of fly-cutting machine
图 29. KDP晶体脆-塑转变（BDT）仿真结果［67］。（a）切削区域应力分布；（b）脆-塑转变随切削方向的变化
Fig. 29. Simulation results of BDT of KDP crystal[67]. (a) Stress state in cutting zone; (b) variation of BDT with cutting direction
图 30. KDP晶体飞切加工表面检测结果。（a）低频误差（PV为2.1λ）；（b）中频PSD1（RMS为3.14 nm）；（c）中频PSD2（RMS为0.68 nm）；（d）粗糙度（RMS为0.61 nm）
Fig. 30. Measurement results of KDP surface for fly-cutting. (a) Low frequency error (PV is 2.1λ); (b) middle frequency PSD1 (RMS is 3.14 nm); (c) middle frequency PSD2 (RMS is 0.68 nm); (d) roughness (RMS is 0.61 nm)
图 31. 两种典型的磨削缺陷。（a）规律性分布的虚线缺陷；（b）偶发深砂眼缺陷
Fig. 31. Two typical grinding defects. (a) Regularly distributed dotted line defects; (b) occasional deep pit defect
图 33. 氧化铈抛光颗粒形貌及其粒度分布图。（a）颗粒形貌图；（b）粒度分布图
Fig. 33. Morphology and particle size distribution of ceria polishing particles. (a) Particle morphology; (b) particle size distribution diagram
图 34. 不同方法处理后的熔石英表面金属元素含量［82］。（a）采用HF/BOE刻蚀后的铈元素含量；（b）采用HNO3刻蚀后的金属元素含量
Fig. 34. Content of metallic elements on surface of fused silica treated by different methods[82]. (a) Ce content after HF/BOE etching; (b) metallic element content after HNO3 etching
图 35. 化学刻蚀深度对熔石英元件的表面粗糙度和激光损伤阈值的影响［83］。（a）表面粗糙度；（b）激光损伤阈值
Fig. 35. Effect of chemical etching depth on surface roughness and laser damage threshold of fused silica[83]. (a) Surface roughness;(b) laser damage threshold
许乔, 陈贤华, 汪圣飞, 钟波, 谢瑞清, 王健. 高功率激光光学元件超精密制造技术[J]. 光学学报, 2022, 42(17): 1712004. Qiao Xu, Xianhua Chen, Shengfei Wang, Bo Zhong, Ruiqing Xie, Jian Wang. Ultra-Precision Manufacturing Technology of High Power Laser Optics[J]. Acta Optica Sinica, 2022, 42(17): 1712004.
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