以共轭涡旋光干涉原理为基础，理论分析了干涉图像旋转角度和位移量的对应关系，利用光学仿真系统验证了理论的可行性。采用基于空间光调制器和改进型的马赫⁃泽德干涉仪组成的共轭涡旋光干涉测量系统，利用不同拓扑荷数的共轭涡旋光实验测量了纳米位移台的位移变化。实验结果表明，在位移量为100 nm、200 nm和250 nm的情况下，拓扑荷数为3时的相对误差最小，分别为2.19%、1.28%和1.27%。研究结果有助于提高基于共轭涡旋光干涉位移测量的精度。

Based on the interference principle of conjugated vortex beams， the relationship between the rotation angle and displacement of the interference image was theoretically analyzed， and the feasibility of the theory by optical simulation system was verified. An interferometer composed of a spatial light modulator and an improved Mach-Zehnder interferometer was designed to measure the displacement of the nano-displacement stage using the conjugated vortex beams with different topological charges.The experimental results showed that when the displacement was 100 nm， 200 nm and 250 nm， the relative error was the smallest when the topological charge was 3， which was 2.19 %， 1.28 % and 1.27 %， respectively. The research results were helpful to improve the accuracy of displacement measurement based on conjugated vortex beams interference.