一种高分辨力、大行程微驱动压电马达
[1] 凌宁,官春林. 变形反射镜的发展[J]. 光电工程,1995,22(1):14-22.
[2] 白春礼. 扫描隧道显微技术及其应用[M]. 上海:上海科学技术出版社, 1992.
[3] SAKUTA S, UEDA K, OGAWA K, et al. Precision Dual Positioning System[J]. SPIE, 1990, 1334:10-17.
[4] REAY N K. Sub-nanometer Precision Close-Loop Positioning for Optics and X-Y Stage Control Using Capacitance Displacement Sensors and Piezo-electric Actuators[J]. SPIE, 1993, 2088:150-159.
[5] . Subnanometer Behavior of a Capacitive Feedback, Piezoelectric Displacement Actuator[J]. Rev. Sci. Instrum, 1992, 63(2): 1680-1689.
[6] ATHERTON P D, XU Y, MCCONNELL M. New X-Y Stage for Precision Positioning and Scanning[J]. SPIE, 1996, 2865:15-20.
王皓, 凌宁, 曾志革. 一种高分辨力、大行程微驱动压电马达[J]. 光电工程, 2003, 30(4): 50. 王皓, 凌宁, 曾志革. A piezomotor with high-resolution and large-stroke driving features[J]. Opto-Electronic Engineering, 2003, 30(4): 50.