压电与声光, 2022, 44 (2): 187, 网络出版: 2022-06-14
基于层次级联模型的声表面波COM参数提取方法
A Method for Extracting COM Parameters of Surface Acoustic Wave Based on Hierarchical Cascading Technique
摘要
该文研究了基于层次级联模型的耦合模(COM)参数提取方法。通过仿真42°Y-X LiTaO3衬底的有限长声表面波(SAW)单端谐振器,提取COM参数及建立COM参数数据库,研制了一款1 200 MHz的三换能器混合结构的SAW滤波器。结果表明,实际制作器件响应和仿真幅频响应符合性好,验证了该文提取COM参数方法的可行性,可用于指导SAW滤波器设计。
Abstract
This paper studied the COM parameters extraction method based on the hierarchical cascading technique, By simulating on a finite-length SAW single port resonator on 42° rotated Y-X LiTaO3 substrate, the COM parameters were extracted and the COM parameters datasets was established, A 1 200 MHz SAW filter with 3-IDT CRF hybrid structure has been developed, The results show that the amplitude-frequency response of the actual device is in good agreement with that of the simulated one,which verifies the feasibility of the method of extracting COM parameters in this article,and can be used to guide the design of SAW filters,
李桦林, 谭发曾, 伍平. 基于层次级联模型的声表面波COM参数提取方法[J]. 压电与声光, 2022, 44(2): 187. LI Hualin, TAN Fazeng, WU Ping. A Method for Extracting COM Parameters of Surface Acoustic Wave Based on Hierarchical Cascading Technique[J]. Piezoelectrics & Acoustooptics, 2022, 44(2): 187.