封闭式柱形微型惯性冲击压电马达

针对精密仪器及微小型设备对线性微进给驱动马达的需求，该文设计了一种封闭式柱形微型惯性冲击压电马达，并验证了马达工作原理的可行性。制作出马达样机并进行实验测试，结果表明，施加预紧力为0.25 N，驱动信号锯齿波电压峰-峰值为50 V，频率为500 Hz时，马达空载输出最大速度为6.19 mm/s，步进分辨率为12 μm；施加预紧力为0.5 N，驱动信号电压峰-峰值为50 V，频率为500 Hz时，最大负载为20 g。

Abstract

A closed cylindrical micro inertial impact piezoelectric motor structure is designed to meet the requirements of linear micro feed drive motor for precision instruments and micro devices, and the feasibility of the operating principle of the motor is verified. A prototype motor is fabricated and tested experimentally. The results show that when the preload is 0.25 N, the peak-peak value of the sawtooth voltage of the driving signal is 50 V, and the frequency is 500 Hz, the maximum speed of the no-load output of the motor is 6.19 mm/s, and the step resolution is 12 μm; When the preload is 0.5 N, the peak-peak value of the driving signal voltage is 50 V, and the frequency is 500 Hz, the maximum load force is 20 g.

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姜凌云, 丁钩苏, 孙明宇. 封闭式柱形微型惯性冲击压电马达[J]. 压电与声光, 2023, 45(5): 715. IANG Lingyun, DING Gousu, SUN Mingyu. Closed Cylindrical Micro Inertial Impact Piezoelectric Motor[J]. Piezoelectrics & Acoustooptics, 2023, 45(5): 715.

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