针对超声扫描用于LTCC滤波器微分层检测的可行性开展研究。首先通过理论计算证实,在参考频率下滤波器内部微分层缺陷对超声波有极高的反射率,对实际检测过程中的分辨力要求进行了说明。其次对滤波器开展超声实测,给出具体可行的检测程序,依据检测结果对缺陷信息进行了判别。然后制取样品剖面,根据获取的缺陷信息定位缺陷。最后,利用FIB刻蚀技术对检测结果进行验证,证实了滤波器微分层超声检测的可行性。

The feasibility of ultrasonic scanning was studied in the micro-delamination detection of LTCC filter. Firstly, it was confirmed through theoretical calculations that the micro-delamination had an extremely high reflectivity to ultrasonic waves at the reference frequency, and the resolution requirements in the actual detection were explained. Secondly, ultrasonic test was applied to the filter, specific test suggestions were provided, and the defect information was identified according to test results. Then, the sample profile was prepared, and the defects were located according to the acquired defect information. Finally, the FIB etching technology was utilized to verify the inspection results and confirm the feasibility of ultrasonic detection of filter micro-delamination defects.