数字掩模投影光刻的极限分辨率研究
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刘玉环, 赵圆圆, 董贤子, 郑美玲, 段宣明, 赵震声. 数字掩模投影光刻的极限分辨率研究[J]. 量子电子学报, 2019, 36(3): 354. LIUYuhuan, ZHAO Yuanyuan, DONG Xianzi, ZHENGMeiling, DUAN Xuanming, ZHAO Zhensheng. Limit resolution of digital mask projection lithography[J]. Chinese Journal of Quantum Electronics, 2019, 36(3): 354.