该文提出了一种面向航天航空飞行器宽量程压力检测的声表面波（SAW）传感器的设计方法。在Y切石英晶体上, 利用半导体平面工艺设计并制作了单端对谐振型传感器, 在此基础上, 通过石英干法刻蚀工艺制备了压力参考腔, 并构建了全石英封装的面压式传感结构。利用搭建的气压测试平台, 对制备的SAW传感器性能进行测试, 测试结果表明, 传感器在0~3.6 MPa量程内获得了1.36 kHz/MPa的检测灵敏度, 并表现出良好的线性度。

This paper presents a design method of surface acoustic wave (SAW) sensor for wide range pressure detection of aerospace vehicles. A single end pair resonant sensor is designed and fabricated on Y-cut quartz crystal by using semiconductor planar process. On this basis, the pressure reference cavity is fabricated by quartz dry etching process, and the surface pressure sensing structure with all quartz package is constructed. The performance of SAW sensor is tested by using the built air pressure test platform. The results show that the sensor has a detection sensitivity of 1.36 kHz/MPa in the range of 0~3.6 MPa, and shows good linearity.