压电与声光, 2021, 43 (2): 222, 网络出版: 2021-12-25  

一种防止声表面波器件静电烧伤的方法

Method to Prevent Damage of SAW Devices from Electrostatic Discharge
作者单位
中国电子科技集团公司第二十六研究所, 重庆400060
摘要
为了防止声表面波器件被自身的热释电静电烧伤, 提出了一种新的静电防护方法。该方法采用导电介质来实现对声表面波器件引脚的良好接触,并建立了静电传导途径, 实现了热释电静电的释放, 解决了困扰声表面波器件的静电敏感问题。试验结果表明, 该方法能有效预防静电烧伤, 具有很好的实用性。
Abstract
In order to prevent surface acoustic wave(SAW) devices from being burned by their own pyroelectric static electricity, a new electrostatic protection method is proposed in this paper. In this method, the conductive medium is adopted to realize good connection with the pins of SAW devices. An electrostatic conduction path is built to discharge the pyroelectric static, thus the problem that SAW devices are sensitive to the electrostatic discharge is solved. The experimental results show that the proposed method can effectively prevent electrostatic burns and has good practicability.
参考文献

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[2] 李春忠.一种6英寸铌酸锂晶片或钽酸锂晶片的生产工艺:CN103921205A[P]. 2014-04-04.

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伍平, 赵雪梅, 董加和, 陈彦光. 一种防止声表面波器件静电烧伤的方法[J]. 压电与声光, 2021, 43(2): 222. WU Ping, ZHAO Xuemei, DONG Jiahe, CHEN Yanguang. Method to Prevent Damage of SAW Devices from Electrostatic Discharge[J]. Piezoelectrics & Acoustooptics, 2021, 43(2): 222.

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