激光三角测量方法因其具有结构简单、非接触、信号处理便捷等特点而得到广泛应用。针对工程应用中提出的高精度、大工作距离的测量要求,从激光三角位移传感器结构、光斑定位不确定度和定标方法等方面进行分析,分别讨论了各个因素对于测量精度的影响,并提出了优化方案。经实验验证,该激光三角位移测量系统在110 mm的工作距离下测量误差小于1.2 μm,优于在同等工作条件下的商用激光三角位移传感器。

Laser triangulation is widely applied due to its simple setup, contactless feature and fast data processing. In this paper, the technique is analyzed from the perspectives of light path structure, spot locating uncertainty and calibration method, aiming at high precision, large work distance measurements. The effects of above-mentioned factors on measuring accuracy are discussed, and an optimal scheme is proposed. Experimental results demonstrate that the measurement error of the present sensing system is below 1 μm at a work distance of 110 mm, better than that of a commercial laser triangulation sensor.