针对因压电陶瓷固有的迟滞特性降低了压电陶瓷平台定位精度问题，该文提出一种基于前馈补偿的复合控制系统。首先建立前馈模型，提出并应用一种分段式的Prandtl-Ishlinskii模型，增加拟合精度，同时避免了复杂的求解过程，并求出迟滞逆模型，其建模误差率可达0.69%; 其次，对反馈回路设计了串联比例-积分(PI)数字电路、正弦激励电路及电容转换电路，进一步提高了压电陶瓷定位平台的控制精度。根据国标GB/T 38614—2020的测试标准进行实验测试，结果表明，在设计的复合控制系统控制下，压电陶瓷定位平台正、反向重复定位精度分别为0.013 1 μm和0.015 5 μm，准确度为0.033 5 μm，在计算出反向差值后得出迟滞误差为0.013%。与仅有前馈控制相比，其控制精度提高了79.57%。

A composite control system based on feedforward compensation is proposed to address the issue of reducing the accuracy of piezoelectric ceramic positioning platforms due to the inherent hysteresis characteristics of piezoelectric ceramics. Firstly, a feedforward model is established. A segmented Prandtl Ishlinskii model is proposed and applied to increase the fitting accuracy while avoiding complex solving processes，and a hysteresis inverse model with a modeling error rate of up to 0.69% is obtained. Secondly，a series proportional integral (PI) digital circuit，a sinusoidal excitation circuit，and a capacitor conversion circuit were designed for the feedback loop，further improving the control accuracy of the piezoelectric ceramic positioning platform. The test is carried out according to the national test standard GB/T 38614-2020.The measurement results show that the forward repetitive positioning accuracy and reverse repetitive positioning accuracy of the piezoelectric ceramic positioning platform are 0.013 1 μm and 0.015 5 μm，respectively, and the accuracy of the platform is 0.033 5 μm under the control of the designed composite control system. After calculating the reverse difference，the hysteresis error is 0.013%.Compared with the piezoelectric ceramic positioning platform with only feedforward control，the control accuracy has improved by 79.57%.