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【Thin films】
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Thin films
Effect of annealing on the damage threshold and optical properties of HfO
2
/Ta
2
O
5
/SiO
2
high-reflection film
Download:957次
Jianing Dong
Jie Fan
*
Sida Mao
Yunping Lan
[ ... ]
Xiaohui Ma
Author Affiliations
Abstract
State Key Laboratory of High-Power Semiconductor Laser, Changchun University of Science and Technology, Changchun 130022, China
The effect of thermal annealing on the optical properties, microstructure, and laser-induced damage threshold (LIDT) of HfO
2
/Ta
2
O
5
/SiO
2
HR films has been investigated. The transmission spectra shift to a short wavelength and the X-ray diffraction peaks of monoclinic structure HfO
2
are enhanced after thermal annealing. The calculated results of the m( 111) diffraction peak show that the HfO
2
grain size is increased, which is conducive to increasing the thermal conductivity. Thermal annealing also reduces the laser absorption of high-reflection films. The improvement of thermal conductivity and the decrease of laser absorption both contribute to the improvement of LIDT. The experimental results show that the highest LIDT of 22.4 J/cm
2
is obtained at 300°C annealing temperature. With the further increase of annealing temperature, the damage changes from thermal stress damage to thermal explosion damage, resulting in the decrease of LIDT.
310.1620
Interference coatings
310.4165
Multilayer design
310.4925
Other properties (stress, chemical,etc.)
PDF全文
Full Text
Chinese Optics Letters
2019, 17(11): 113101
Thin films
Te-free SbBi thin film as a laser heat-mode photoresist
Download:854次
Kui Zhang
1,2
Zhengwei Wang
1,2
Guodong Chen
1,2
Yang Wang
1,*
[ ... ]
Heorgi Tsikhanchuk
3
Author Affiliations
Abstract
1
Laboratory of Micro-Nano Optoelectronic Materials and Devices, Key Laboratory of Materials for High-Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
2
Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
3
KBTEM-OMO Joint Stock Company, Minsk 220033, Republic of Belarus
A Te-free binary phase change material SbBi is proposed as a new inorganic photoresist for heat-mode lithography. It shows good film-forming ability (surface roughness <1 nm), low threshold power for crystallization (2 mW), and high etching selectivity (15:1). Line-type, dot-type, and complex pattern structures with the smallest feature size of 275 nm are fabricated on SbBi thin films using a 405 nm diode laser direct writing system. In addition, the excellent grating structures with a period of 0.8 μm demonstrate that thermal interference does not affect the adjacent microstructures obviously. These results indicate that SbBi is a promising laser heat-mode resist material for micro/nanostructure fabrication.
310.6845
Thin film devices and applications
140.3380
Laser materials
PDF全文
Full Text
Chinese Optics Letters
2019, 17(9): 093102
Thin films
A reflecting-type highly efficient terahertz cross-polarization converter based on metamaterials
Download:837次
Xiaoqing Luo
1,2
Zhiyong Tan
1,2,**
Chang Wang
1,2
Juncheng Cao
1,2,*
Author Affiliations
Abstract
1
Key Laboratory of Terahertz Solid-State Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
2
Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
We propose and experimentally demonstrate a wideband linear polarization converter in a reflection mode operating from 2.4 to 4.2 THz with conversion efficiency of more than 80%. Our device can expand the applications to a higher frequency band. A numerical simulation is performed for this metamaterial converter, which shows a good agreement with experimental results. Importantly, a concise and intuitive calculating model is proposed for the Fabry–Pérot cavity. The theoretical results indicate that the underlying reason for the enhanced polarization conversion is the additional phase difference induced by the resonance of the meta-structure and multiple reflections within the Fabry–Pérot cavity.
310.5448
Polarization, other optical properties
310.6628
Subwavelength structures,nanostructures
310.6805
Theory and design
240.5445
Polarization-selective devices
PDF全文
Full Text
Chinese Optics Letters
2019, 17(9): 093101
Thin films
An ORMOSIL porous double-layer broadband antireflective coating
Download:1112次
Huai Xiong
1,2,*
Yongxing Tang
1
Lili Hu
3
Haiyuan Li
1
Author Affiliations
Abstract
1
Key Laboratory of High Power Laser and Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
2
University of Chinese Academy of Sciences, Beijing 100049, China
3
Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
A
λ
/
4
–
λ
/
4
broadband antireflective (AR) coating is developed with a sol-gel dip-coating method. By adding SAR-5 organosilicon resin into a base-catalyzed silica sol top layer and treating at 300°C, a broadband AR coating used for blast shields with a high average transmission of 99.34% (450–950 nm) and good hydrophobicity (with a water-contact angle of 119°) was obtained. After being subjected to rubbing 50 times and being maintained at a relative humidity of around 95% for 50 days, the average transmission of the coating decreased by 0.29% and 0.04%, respectively. This indicates that the organically modified silica (ORMOSIL) broadband AR coating has good abrasion resistance and humidity stability.
310.1210
Antireflection coatings
160.6060
Solgel
310.4165
Multilayer design
PDF全文
Full Text
Chinese Optics Letters
2019, 17(3): 033101
Thin Films
Moisture absorption characteristics of a SiO
2
film from 2 to 3 μm
Yun Cui
*
Hao Li
Kui Yi
Jianda Shao
Author Affiliations
Abstract
Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
We prepare
SiO
2
coatings on different substrates by either electron-beam evaporation or dual ion-beam sputtering. The relative transmittances of the
SiO
2
coatings are measured during the heating process. The
SiO
2
coating microstructures are studied. Results indicate that the intensity and peak position of moisture absorption are closely related to the microstructures of the coatings. The formation of microstructures depends not only on the preparation process of the coatings but also on the substrate characteristics.
310.4925
Other properties (stress, chemical,etc.)
310.6860
Thin films, optical properties
140.3070
Infrared and far-infrared lasers
PDF全文
Full Text
Chinese Optics Letters
2015, 13(2): 023101
Thin Films
Absorption measurement of optical thin films under high power density with a Closed Cavity
Download:1169次
Xiaoting Fang
Shengfu Yuan
*
Wenguang Liu
Baozhu Yan
Bing Huang
Author Affiliations
Abstract
College of Optoelectric Science and Engineering, National University of Defence Technology, Changsha 410073, China
A Closed Cavity measuring platform is built on the basis of a 1000 W-class direct current (DC)-discharge drived continuous-wave (CW) HF/DF chemical laser. On this platform, the absorption coefficients of optical thin films coated on the surfaces of monocrystalline silicon substrates, at the wavelength of 3.6–4.1 μm, is measured, when the power density on the surfaces of optical thin films reaches about
3.16
kW
/
cm
2
. The measuring principle and structure of the Closed Cavity is introduced. The temperature curves and balanced temperature rises of the film-substrate systems under test measured through the experiment is presented in this Letter. The experiments show high reliability, good repeatability and strong practicality. The Closed Cavity measuring platform is applicable for not only absorption measurement but other performance measurement of optical thin films under high power density.
310.6860
Thin films, optical properties
140.3070
Infrared and far-infrared lasers
140.3330
Laser damage
140.3460
Lasers
PDF全文
Full Text
Chinese Optics Letters
2015, 13(3): 033101
Thin Films
Effect of the thickness of light absorption layer on the light-induced transverse thermoelectric effect in Bi
2
Sr
2
Co
2
O
y
films
Guoying Yan
1,2
Liqing Sun
2
Shufang Wang
2,*
Guangsheng Fu
1,2,**
Author Affiliations
Abstract
1
School of Information Engineering, Hebei University of Technology, Tianjin 300401, China
2
Hebei Key Lab of Optic-Electronic Information and Materials, College of Physics Science and Technology, Hebei University, Baoding 071002, China
Light-induced transverse thermoelectric effect is investigated in incline-oriented
Bi
2
Sr
2
Co
2
O
y
thin films covered with a graphite light absorption layer. Upon the illumination of a 980 nm cw laser, an enhanced voltage signal is detected and the improvement degree is found to be dependent on the thickness of the graphite layer. A two-dimensional (2D) heat transport model using the finite-difference method provides a reasonable explanation to the experimental data. Present results give some valuable instructions for the design of light absorption layers in this type of detector.
310.6845
Thin film devices and applications
040.5160
Photodetectors
230.4170
Multilayers
PDF全文
Full Text
Chinese Optics Letters
2015, 13(6): 063101
Thin Films
Role of oxygen defects in inducing the blue photoluminescence of zinc oxide films deposited by magnetron sputtering
Download:993次
Kun Chen
1
Huanfeng Zhu
1
Xinyu Yi
1
Shuai Cheng
1
[ ... ]
Lei Lü
4
Author Affiliations
Abstract
1
Department of Optical Science and Engineering, Fudan University, Shanghai Ultra-Precision Optical Manufacturing Engineering Center, Shanghai 200433, China
2
Key Laboratory of Micro and Nano Photonic Structures (Ministry of Education), Shanghai 200433, China
3
College of Physical Science and Engineering, Tongji University, Shanghai 200092, China
4
Department of Medical Physics, Weifang Medical University, Shandong 261053, China
A number of zinc oxide (ZnO) films are deposited on silicon substrates using the magnetron sputtering method. After undergoing thermal treatment under different conditions, those films exhibit hexagonal wurtzite structures and different photoluminescent characteristics. Besides the notable ultraviolet emission, which is related to the free exciton effect, a distinct blue fluorescence around 475 nm is found in some special samples. The blue photoluminescence emission of the ZnO film is believed to be caused by oxygen vacancies.
310.6860
Thin films, optical properties
310.1860
Deposition and fabrication
300.6280
Spectroscopy, fluorescence and luminescence
260.3800
Luminescence
PDF全文
Full Text
Chinese Optics Letters
2015, 13(10): 103101
Thin Films
Using lead germanium telluride as a high-index coating material in the mid-wavelength infrared narrow bandpass filters
Download:803次
Ping Xie
1
Bin Li
1,*
Suying Zhang
1
Dingquan Liu
1,2
Author Affiliations
Abstract
1
Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China
2
School of Physical Science and Technology, Shanghai Tech University, Shanghai 200031, China
In our investigation, lead germanium telluride, which is a pseudo-binary alloy of IV-VI narrow-gap semiconductor compounds of PbTe and GeTe, can be used in the fabrication of mid-wavelength infrared narrow bandpass filters as a high-index coating material, due to its high refractive index, lower absorption, and tunability of fundamental absorption edges. It is demonstrated that a half-width of 160 nm and a better rejection ratio can be obtained for a simple 8-layer double cavity filter with a central wavelength at 4 μm, compared with a half-width of 390 nm for those conveniently fabricated using Ge as high-index material.
310.1620
Interference coatings
310.3840
Materials and process characterization
310.6188
Spectral properties
310.4165
Multilayer design
PDF全文
Full Text
Chinese Optics Letters
2015, 13(12): 123101
Thin Films
Fatigue effect of hafnia/silica high-reflective coatings under multiple laser pulses at 1064 nm
Yanyan Cui
1,2
Hongji Qi
1,*
Hu Wang
1,2
Bin Wang
1,2
[ ... ]
Kui Yi
1
Author Affiliations
Abstract
1
Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
2
University of Chinese Academy of Sciences, Beijing 100049, China
The defect evolution is investigated for high-reflective coatings under multiple irradiations with an improved statistical model. The fatigue effect is observed with an increase in the shot numbers, but the fatigue process will not endure and it tends to be saturated when the number of shots reaches a certain level. With the addition of a bilayer unit, the defect density distribution of the high-reflective coatings is obtained. Two defect types are identified, and the differentiation of the high-damage precursors can well explain the decrease of the laser-induced damage threshold, as well as the saturation effect.
PDF全文
Full Text
Chinese Optics Letters
2015, 13(Suppl): S23102
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