激光与光电子学进展, 2014, 51 (1): 011202, 网络出版: 2014-01-03   

基于迭代梯度算法的子孔径拼接检测技术研究 下载: 619次

Research on Sub-Aperture Stitching Testing Technology Based on Iterative Gradient Algorithm
作者单位
1 中国科学院长春光学精密机械与物理研究所 光学系统先进制造技术重点实验室, 吉林 长春 130033
2 中国科学院大学, 北京 100049
摘要
为了解决粗大调整误差下大口径光学平面镜的子孔径拼接检测问题,基于迭代梯度算法,建立了一套合理的拼接算法和数学模型,同时编制了拼接程序。结合工程实例,利用F600mm干涉仪实现了对F800mm平面镜的拼接测量。检测中,基于靶标对各子孔径实现对准,拼接所得面形光滑连续无狭缝。实验结果表明,利用迭代梯度算法可以高精度地完成粗大调整误差下大口径平面镜的拼接检测。
Abstract
To accomplish the sub-aperture stitching testing for large aperture flat mirror under considerable adjustment error, we establish a reasonable stitching algorithm and mathematical model based on iterative gradient algorithm. At the same time, relative program is written for stitching. Combined with engineering examples, we measure a F800mm flat mirror with a F600mm interferometer in stitching method. In the measurement, we accomplish the alignment between sub-apertures with targets and the stitching result is smooth. Experimental results show that stitching measurements of large aperture flat mirror could be well down with the this algorithm under considerable adjustment errors.
参考文献

[1] 李新南, 张明意. 大口径光学平面的子孔径拼接检验研究[J]. 光学技术, 2006, 32(4): 514-517.

    Li Xinnan, Zhang MingYi. Study on the sub-aperture stitching interferometry for large plano optics optical techni [J]. Optical Technique, 2006, 32(4): 514-517.

[2] C J Kim. Polynomial fit of interferograms [J]. Appl Opt, 1982, 21(24): 4521-4525.

[3] James H Burge, Chunyu Zhao. Applications of subaperture stitching interferometry for very large mirrors [C]. SPIE, 2012, 8450: 84500X.

[4] Christopher Supranowitz, Chuck McFee, Paul Murphy. Asphere metrology using variable optical null technology [C]. SPIE, 2012, 8416: 841604.

[5] Shanyong Chen, Shengyi Li, Yifan Dai, et al.. Iterative algorithm for subaperture stitching test with spherical interferometers [J]. J Opt Soc Am A, 2006, 23(5): 1219-1226.

[6] Xi Hou, Fan Wu, Li Yang, et al. Experimental study on measurement of aspheric surface shape with complementary annular subaperture interferometric method [J]. Opt Express, 2007, 15(20): 12890-12899.

[7] Hongyan Xu, Hao Xian, Yudong Zhang. Algorithm and experiment of whole-aperture wavefront reconstruction from annular subaperture Hartmann-Shack gradient data [J]. Opt Express, 2010, 18(13): 13431-13443.

[8] 徐洪艳, 鲜 浩, 张雨东. 利用环形子孔径哈特曼-夏克斜率数据复原全孔径波前相位算法研究[J]. 光学学报, 2011, 31(1): 0112005.

    Xu HongYan, Xian Hao, Zhang Yudong. Algorithm for reconstructing the whole-aperture wavefront from annular subaperture Hartmann-Shack gradient data [J]. Acta Optica Sinica, 2011, 31(1): 0112005.

[9] Pengfei Zhang, Hong Zhao, Xiang Zhou, et al.. Sub-aperture stitching interferometry using stereovision positioning technique [J]. Opt Express, 2010, 18(14): 15216-15222.

[10] 汪利华, 吴时彬, 任 戈, 等. 子孔径拼接检测光学系统波前机械定位误差补偿算法[J].光学学报, 2012, 32(1): 0112003.

    Wang LiHua, Wu ShiBin, Ren Ge, et al.. Location error compensation algorithm for measuring optical system wave front by subaperture stitching [J]. Acta Optia Sinica, 2012, 32(1): 0112003.

[11] 王聪, 张军伟, 杜 丽, 等. 光栅拼接技术研究进展[J]. 激光与光电子学进展, 2011, 48(8): 080501.

    Wang Cong, Zhang Junwei, Du Li, et al.. Technology progress of grating tiling [J]. Laser & Optoelectronics Progress, 2011, 48(8): 080501.

[12] Masashi O, Katsuyuki O, Jumpei T. Measurement of large plane surface shapes by connecting small-aperture interferograms [J]. Opt. Eng, 1994, 33(2): 608-613.

[13] 徐新华, 王 青, 宋 波, 等. 基于子孔径拼接技术的大尺寸光学材料均匀性检测系统[J]. 光学学报, 2012, 32(4): 0412002.

    Xu XinHua, Wang Qing, Song Bo, et al.. Measurement system of optical homogeneity of large-size optical material based on subaperture stitching technique [J]. Acta Optica Sinica, 2012, 32(4): 0412002.

郑立功, 闫力松, 王孝坤, 薛栋林, 胡海翔, 张学军. 基于迭代梯度算法的子孔径拼接检测技术研究[J]. 激光与光电子学进展, 2014, 51(1): 011202. Zheng Ligong, Yan Lisong, Wang Xiaokun, Xue Donglin, Hu Haixiang, Zhang Xuejun. Research on Sub-Aperture Stitching Testing Technology Based on Iterative Gradient Algorithm[J]. Laser & Optoelectronics Progress, 2014, 51(1): 011202.

本文已被 3 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!