[1] 廖振兴, 杨芳, 夏文建. 光学薄膜膜厚监控方法及其进展［J］. 激光杂志, 2004, 25(4): 10-12.

    Liao Z X, Yang F, Xia W J. Methods and progress of monitoring thin film thickness of optical thin films［J］. Laser Journal, 2004, 25(4): 10-12.

[2] 弥谦, 赵磊. 一种监控膜厚的新算法［J］. 应用光学, 2014, 35(2): 248-253.

    Mi Q, Zhao L. New algorithm for monitoring optical thin-film thickness［J］. Journal of Applied Optics, 2014, 35(2): 248-253.

[3] 殷浩, 应雄纯, 宗杰. 光学膜厚监控方法［J］. 红外与激光工程, 2008, 37(4): 723-727.

    Yin H, Ying X C, Zong J. Monitoring method for optical thickness of thin film［J］. Infrared and Laser Engineering, 2008, 37(4): 723-727.

[4] 韩军. 光学膜厚宽带监控关键技术研究［D］. 西安: 西安电子科技大学, 2011.

    Han J. Research on key technologies of optical film thickness broadband monitoring［D］. Xi′an: Xi′an Electronic and Science University, 2011.

[5] Yoshioka Y, Ikuta T, Taji T, et al. Monitoring of Si molecular-beam epitaxial growth by an ellipsometric method［J］. Japanese Journal of Applied Physics, 2001, 40(1): 371-375.

[6] Wu P Y, Gu P F, Tang J F. Wideband monitoring of optical coatings with deposition error correction［J］. Proceedings of SPIE, 1993, 2000: 121-132.

[7] 朱美萍, 易葵, 郭世海, 等. 光学薄膜膜厚自动控制系统的研究［J］. 光子学报, 2007, 36(2): 308-311.

    Zhu M P, Yi K, Guo S H, et al. Research of an automatic system monitoring thickness of optical thin-film［J］. Acta Photonica Sinica, 2007, 36(2): 308-311.

[8] 林宇翔. 光学薄膜厚度实时监控系统及其反演的研究［D］. 杭州: 浙江大学, 2004.

    Lin Y X. Optical thin film thickness real-time monitoring system and its inversion research［D］. Hangzhou: Zhejiang University, 2004.

[9] 杨明红, 刘劲松, 陈清明, 等. 光学薄膜淀积监控方法研究［J］. 激光与光电子学进展, 2001, 38(s1): 500-502.

    Yang M H, Liu J S, Chen Q M, et al. Research on monitoring methods for optical thin film deposition［J］. Laser & Optoelectronics Progress, 2001, 38(s1): 500-502.