李逵 1,4孟润宇 2,3李睿晅 1,4张光银 1,4[ ... ]樊仲维 4,*
作者单位
摘要
1 中国科学院空天信息创新研究院,北京 100094
2 云南大学物理与天文学院,云南 昆明 650216
3 中国科学院云南天文台,云南 昆明 650216
4 中国科学院大学光电学院,北京 100049
5 北京航空航天大学仪器科学与光电工程学院,北京 100191
开发了由高重复频率(3 kHz)高能量(3 mJ)钛蓝宝石激光器驱动的极紫外和软X射线高次谐波激光光源。该光源系统在30 nm(光子能量为~45 eV)波长附近实现了大于120 μW的平均功率,在13.46 nm波长(光子能量为~92 eV)处实现了1.9 μW的平均功率,其中在13.46 nm波长处带宽为0.124 nm的单个谐波实现了0.32 μW的平均功率。此外,在该系统中,激光功率连续12 h的不稳定性均方根小于5%,连续8 h光束指向均方根小于10 µrad。该系统在生物成像、干涉光刻和芯片检测等领域中具有重要应用。
激光器 高次谐波 极紫外激光 13.5 nm光源 软X射线 飞秒激光 
中国激光
2024, 51(7): 0701011
Author Affiliations
Abstract
1 Joint Institute of High Temperature of Russian Academy of Sciences, Moscow125412, Russia
2 Joint Institute of High Temperature of Russian Academy of Sciences, Moscow125412, Russia
3 Keldysh Institute of Applied Mathematics, Russian Academy of Sciences, Moscow 125047, Russia
4 Beijing National Laboratory of Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China
5 Beijing National Laboratory of Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China
6 Department of Physics and Astronomy, Shanghai Jiao Tong University, Shanghai200240, China
In this work, we optimized a clean, versatile, compact source of soft X-ray radiation $(E_{\text{x}\text{-}\text{ray}}\sim 3~\text{keV})$ with an yield per shot up to $7\times 10^{11}~\text{photons}/\text{shot}$ in a plasma generated by the interaction of high-contrast femtosecond laser pulses of relativistic intensity $(I_{\text{las}}\sim 10^{18}{-}10^{19}~\text{W}/\text{cm}^{2})$ with supersonic argon gas jets. Using high-resolution X-ray spectroscopy approaches, the dependence of main characteristics (temperature, density and ionization composition) and the emission efficiency of the X-ray source on laser pulse parameters and properties of the gas medium was studied. The optimal conditions, when the X-ray photon yield reached a maximum value, have been found when the argon plasma has an electron temperature of $T_{\text{e}}\sim 185~\text{eV}$, an electron density of $N_{\text{e}}\sim 7\times 10^{20}~\text{cm}^{-3}$ and an average charge of $Z\sim 14$. In such a plasma, a coefficient of conversion to soft X-ray radiation with energies $E_{\text{x}\text{-}\text{ray}}\sim 3.1\;(\pm 0.2)~\text{keV}$ reaches $8.57\times 10^{-5}$, and no processes leading to the acceleration of electrons to MeV energies occur. It was found that the efficiency of the X-ray emission of this plasma source is mainly determined by the focusing geometry. We confirmed experimentally that the angular distribution of the X-ray radiation is isotropic, and its intensity linearly depends on the energy of the laser pulse, which was varied in the range of 50–280 mJ. We also found that the yield of X-ray photons can be notably increased by, for example, choosing the optimal laser pulse duration and the inlet pressure of the gas jet.
clean X-ray source gas jets laser plasma laser–gas interaction soft X-rays 
High Power Laser Science and Engineering
2020, 8(2): 02000e26
Author Affiliations
Abstract
1 Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
3 University of Chinese Academy of Sciences, Beijing 100049, China
We theoretically investigate the delay-dependent attosecond transient absorption spectra in the helium atom dressed by an infrared laser pulse in the wavelength range of 800–2400 nm. By numerically solving the three-dimensional time-dependent Schr dinger equation, we find that the absorption spectrogram exhibits a multiple-fringe structure for using the mid-infrared dressing pulse. The quantitative calculation of the transition matrix between different Floquet states provides direct evidence on the origin of the multiple-fringe structure. Our result shows that the wavelength of the dressing pulse is an important parameter and the unique feature of attosecond transient absorption spectroscopy can be induced in the mid-infrared regime.
260.3090 Infrared, far 300.1030 Absorption 340.7480 X-rays, soft x-rays, extreme ultraviolet (EUV) 
Chinese Optics Letters
2019, 17(8): 082601
Author Affiliations
Abstract
1 State Key Laboratory of High Field Laser Physics , Shanghai Institute of Optics and Fine Mechanics , Chinese Academy of Sciences , Shanghai 201800 , China
2 University of Chinese Academy of Sciences , Beijing 100049 , China
3 Collaborative Innovation Center of IFSA , Shanghai Jiao Tong University , Shanghai 200240 , China
4 School of Physical Science and Technology , ShanghaiTech University, Shanghai 200031 , China
In this study, we investigate a new simple scheme using a planar undulator (PU) together with a properly dispersed electron beam ( beam) with a large energy spread ( ) to enhance the free-electron laser (FEL) gain. For a dispersed beam in a PU, the resonant condition is satisfied for the center electrons, while the frequency detuning increases for the off-center electrons, inhibiting the growth of the radiation. The PU can act as a filter for selecting the electrons near the beam center to achieve the radiation. Although only the center electrons contribute, the radiation can be enhanced significantly owing to the high-peak current of the beam. Theoretical analysis and simulation results indicate that this method can be used for the improvement of the radiation performance, which has great significance for short-wavelength FEL applications.
free-electron lasers X-rays soft X-rays extreme ultraviolet 
High Power Laser Science and Engineering
2018, 6(4): 04000e64
Author Affiliations
Abstract
1 Department of Applied Physics, Nanjing University of Science and Technology, Nanjing 210094, China
2 J. R. Macdonald Laboratory, Department of Physics, Kansas State University, Manhattan, Kansas 66506, USA
We demonstrate the suppression of soft X-ray high harmonics generated by two-color laser pulses interacting with Ne gas in a gas cell. We show that harmonic suppression can occur at the proper combination of the propagation distance and gas pressure. The physical mechanism behind is the phase mismatch between “short”-trajectory harmonics generated at the early and later times through the interplay of geometric phase, dispersion, and plasma effects. In addition, we demonstrate that the position and depth of harmonic suppression can be tuned by increasing the gas pressure. Furthermore, the suppression can be extended to other laser focusing configurations by properly scaling macroscopic parameters. Our investigation reveals a simple and novel experimental scheme purely relying on the phase mismatch for selectively controlling soft X-ray tabletop light sources without adopting the filters for applications.
Harmonic generation and mixing Ultrafast nonlinear optics X-rays, soft x-rays, extreme ultraviolet (EUV) Ultrafast phenomena 
Photonics Research
2018, 6(5): 05000434
Author Affiliations
Abstract
Key Laboratory of Advanced Micro-Structured Materials MOE, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China
A Schwarzschild microscope with a numerical aperture of 0.2 and a magnification of 130 in a 100 μm field of view (FOV) is designed and is working at 13.5 nm. Meanwhile, a CCD is used as a detector with a pixel size of 13 μm×13 μm and imaging area of 13 mm×13 mm. The imaging quality with tolerances of system and errors of mirrors are considered. We obtain that the best on-axes object resolution can be up to about 200 nm, the average value is 230 nm, and the resolution is about 360 nm at 80 μm FOV.
340.7480 X-rays, soft x-rays, extreme ultraviolet (EUV) 120.4640 Optical instruments 220.2740 Geometric optical design 
Chinese Optics Letters
2017, 15(4): 043401
Baoquan Li 1,2Huan Mou 1,2,*
Author Affiliations
Abstract
1 National Space Science Center, Chinese Academy of Science, Beijing 100190, China
2 University of Chinese Academy of Science, Beijing 100190, China
The vacuum-sealed miniature modulated x-ray source (VMMXS) with a hot cathode is fabricated via the single-step brazing process in a vacuum furnace. An experiment following the VMMXS is implemented to present its performances, including the influence of grid electrode potential on x-ray intensities. The modulation type of the grid electrode as a switch is proposed, and its feasibility is successfully demonstrated. It is noteworthy to discover a phenomenon for the first time, to the best of our knowledge, that the high repetition frequency grid pulse of the VMMXS has a significant effect on the x-ray intensity. The probable cause for this new finding is analyzed.
340.7480 X-rays, soft x-rays, extreme ultraviolet (EUV) 230.6080 Sources 260.6048 Soft x-rays 300.6560 Spectroscopy, x-ray 
Chinese Optics Letters
2016, 14(7): 073401
Author Affiliations
Abstract
1 Key Laboratory of Advanced Micro-Structured Materials MOE, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China
2 Institute of Nuclear Physics and Chemistry CAEP, Mianyang 621900, China
The Pd/B4C multilayer is a promising candidate for high reflectance mirrors operating in the 8–12 nm extreme ultraviolet wavelength region. To extend the working bandwidth beyond the L-edge of silcon, we theoretically design broadband Pd/B4C multilayers. We discuss the influence of the desired reflectance of the plateau, number of bilayers, and the real structural parameters, including the interface widths, layer density, and thickness deviation, on the reflectivity profile. Assuming the interface width to be 0.6 nm, we design aperiodic multilayers for broad wavebands of 9.0–10.0, 8.5–10.5, and 8.0–11.0 nm, with average reflectivities of 3.1%, 5.0%, and 9.5%, respectively.
310.4165 Multilayer design 230.4170 Multilayers 340.7480 X-rays, soft x-rays, extreme ultraviolet (EUV) 350.1270 Astronomy and astrophysics 
Chinese Optics Letters
2016, 14(7): 073101
Jiaoling Zhao 1,2Hongbo He 1,*Hu Wang 1,2Kui Yi 1[ ... ]Yun Cui 1
Author Affiliations
Abstract
1 Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
2 University of Chinese Academy of Sciences, Beijing 100049, China
Complementary analysis techniques are applied in this work to study the interface structure of Mo/Si multilayers. The samples are characterized by grazing incident x-ray reflectivity, x-ray photoelectron spectroscopy, high-resolution transmission electron microscopy, and extreme ultraviolet reflectivity. The results indicate that the layer thickness is controlled well with small diffusion on the interface by forming MoSi2. Considering MoSi2 as the interface composition, simulating the result of our four-layer model fits well with the measured reflectivity curve at 13.5 nm.
340.7480 X-rays, soft x-rays, extreme ultraviolet (EUV) 230.4170 Multilayers 
Chinese Optics Letters
2016, 14(8): 083401
Author Affiliations
Abstract
1 National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, China
2 Institut für Angewandte Physik, Friedrich-Schiller-Universität Jena, Max-Wien-Platz 1, Jena 07743, Germany
3 Technische Universität Braunschweig, Laboratory for Emerging Nanometrology, Pockelsstr. 14, Braunschweig 38106, Germany
4 Physikalisch-Technische Bundesanstalt, Bundesallee 100, Braunschweig 38116, Germany
Near-field holography (NFH), with its virtues of precise critical dimensions and high throughput, has a great potential for the realization of soft x-ray diffraction gratings. We show that NFH with reflections reduced by the integration of antireflective coatings (ARCs) simplifies the NFH process relative to that of setups using refractive index liquids. Based on the proposed NFH with ARCs, gold-coated laminar gratings were fabricated using NFH and subsequent ion beam etching. The efficiency angular spectrum shows that the stray light of the gratings is reduced one level of magnitude by the suppression of interface reflections during NFH.
050.1950 Diffraction gratings 120.4610 Optical fabrication 220.4000 Microstructure fabrication 340.7480 X-rays, soft x-rays, extreme ultraviolet (EUV) 
Chinese Optics Letters
2016, 14(9): 090501

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