基于黑硅微结构的全硅PIN光电探测器
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郑泽宇, 罗谦, 徐开凯, 刘钟远, 朱坤峰. 基于黑硅微结构的全硅PIN光电探测器[J]. 光电工程, 2021, 48(5): 200364. Zheng Zeyu, Luo Qian, Xu Kaikai, Liu Zhongyuan, Zhu Kunfeng. All-silicon PIN photodetector based on black silicon microstructure[J]. Opto-Electronic Engineering, 2021, 48(5): 200364.
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