压电与声光, 2022, 44 (2): 234, 网络出版: 2022-06-14
基于有限元分层级联技术SAW滤波器精确计算
Precise Calculation of SAW Filter Based on Finite Element Hierarchical Cascading Technique
SAW器件 精确表征 分层级联技术(HCT) 全波仿真 surface acoustic wave(SAW) devices accurate characterization hierarchical cascading technique(HCT) full-wave simulation
摘要
针对任意复杂结构声表面波(SAW)器件精确快速分析及其内部多物理场耦合效应的精确表征问题，该文在充分考虑SAW器件实际存在的各种影响因素下，采用有限元分层级联算法推导出有限长结构SAW器件的有限元数学模型。基于全波仿真技术，考虑管座及键合线等封装模型电磁效应，对漏波型42°Y-X LiTaO3温度补偿型声表面波(TC-SAW)器件进行计算，通过与实验结果对比,验证了计算模型的精确性，为高性能SAW器件的精确快速设计提供了支撑。
Abstract
In order to analyze the surface acoustic wave (SAW) devices with arbitrary complex structure, and accurately and quickly characterize the multi-physical fields in SAW devices, the finite element model of the finite-length SAW device is derived by using the finite element hierarchical cascading technique(HCT) algorithm, Based on the full-wave simulation technology, the compensated-temperature leaky surface acoustic wave(TC-SAW) device with 42°Y-X LiTaO3 is calculated considering the electromagnetic effects of the package models such as the tube holder and the bonding wire, The accuracy of the HCT model is verified by comparing with the experimental results, This work can provide support for accurate and rapid design of high performance SAW devices,
陈正林, 赵雪梅, 贺艺, 潘虹芝, 白涛, 杜雪松, 李桦林, 肖强, 陈彦光, 马晋毅. 基于有限元分层级联技术SAW滤波器精确计算[J]. 压电与声光, 2022, 44(2): 234. CHEN Zhenglin, ZHAO Xuemei, HE Yi, PAN Hongzhi, BAI Tao, DU Xuesong, LI Hualin, XIAO Qiang, CHEN Yanguang, MA Jinyi. Precise Calculation of SAW Filter Based on Finite Element Hierarchical Cascading Technique[J]. Piezoelectrics & Acoustooptics, 2022, 44(2): 234.
PDF全文
