低温漂薄膜体声波谐振器研究
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蒋世义, 蒋平英, 刘娅, 甄静怡, 徐阳, 彭霄, 唐中剑. 低温漂薄膜体声波谐振器研究[J]. 压电与声光, 2022, 44(2): 171. JIANG Shiyi, JIANG Pingying, LIU Ya, ZHEN Jingyi, XU Yang, PENG Xiao, TANG Zhongjian. Study on Thin Film Bulk Acoustic Resonator with Low Temperature Drift[J]. Piezoelectrics & Acoustooptics, 2022, 44(2): 171.