声子晶体对ZnO/41°YX-LiNbO3结构Love波器件性能的影响

商树林; 梁苏鹏; 肖勇兵; 袁宇鑫; 王艳

doi:doi:10.11977/j.issn.1004-2474.2021.03.007

压电与声光, 2021, 43 (3): 324, 网络出版: 2021-12-28

声子晶体对ZnO/41°YX-LiNbO3结构Love波器件性能的影响

Influences of PnCs on Properties of Love Wave Device with ZnO/41°YX-LiNbO3 Structure

论文大纲

商树林梁苏鹏肖勇兵袁宇鑫王艳

作者单位

南京邮电大学电子与光学工程学院微电子学院, 江苏南京 210046

声表面波声子晶体有限元分析机电耦合系数 Love波 surface acoustic wave phononic crystal finite element analysis electro-mechanical coupling coefficient Love wave

摘要

利用三维有限元法(3D-FEM)分析了Ni柱型声子晶体对(110)ZnO/41°YX-LiNbO3结构Love波器件声学特性(包括相速度、机电耦合系数和质量灵敏度等)的影响。结果表明, Ni柱的引入对所激发Love波性能的影响较大, Love波1阶模式阈值提前(激发1阶模式Love波所需的导波层厚度减小到0.05), 机电耦合系数提高了约8%。同时, Ni 柱/(110)ZnO/41°YX-LiNbO3结构Love波器件的质量灵敏度也得到改善, 其Love波0阶和1阶模式的质量灵敏度较无Ni柱结构Love波器件分别提高了3倍和4倍。该研究结果为利用声子晶体结构实现高频声表面波器件的研制及其应用领域的拓宽提供了理论依据。

Abstract

The influences of Ni pillar phononic crystal (Ni PnCs) on the acoustic properties (phase velocity, electro-mechanical coupling coefficient and mass sensitivity etc.) of Love wave devices with (110) ZnO/IDTs/41°YX-LiNbO3 structure are analyzed by the three-dimensional finite element method (3D-FEM). The influences of Ni pillars on SAW properties, including the phase velocity, electro-mechanical coupling coefficient, and mass sensitivity, are studied. The results indicate that the 1st mode properties of Love wave are greatly influenced by the introduction of Ni pillars, which are reflected by the significant decrease of cutoff point 0.05, and the increase of electro-mechanical coupling coefficient (~8%). Meanwhile, the mass sensitivities of the first two order Love wave modes are also improved, which are 3 and 4 times higher than that of Ni pillars-free Love waves, respectively. The results provide a theoretical basis for the fabrication of SAW devices operated with high frequency by using phononic crystals (PnCs), as well as the broadening of its application fields.

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商树林, 梁苏鹏, 肖勇兵, 袁宇鑫, 王艳. 声子晶体对ZnO/41°YX-LiNbO3结构Love波器件性能的影响[J]. 压电与声光, 2021, 43(3): 324. SHANG Shulin, LIANG Supeng, XIAO Yongbing, YUAN Yuxin, WANG Yan. Influences of PnCs on Properties of Love Wave Device with ZnO/41°YX-LiNbO3 Structure[J]. Piezoelectrics & Acoustooptics, 2021, 43(3): 324.

声子晶体对ZnO/41°YX-LiNbO3结构Love波器件性能的影响

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