压电与声光, 2023, 45 (1): 66, 网络出版: 2023-04-07
硅基钽酸锂压电单晶复合薄膜材料及应用
Single-Crystal LiTaO3 Composite Film Material on Si Substrate and Its Applications
基本信息
DOI: | 10.11977/j.issn.1004-2474.2023.01.014 |
中图分类号: | TN384 |
栏目: | |
项目基金: | -- |
收稿日期: | 2023-01-11 |
修改稿日期: | -- |
网络出版日期: | 2023-04-07 |
通讯作者: | |
备注: | -- |
丁雨憧, 何杰, 陈哲明, 龙勇, 毛世平, 马晋毅. 硅基钽酸锂压电单晶复合薄膜材料及应用[J]. 压电与声光, 2023, 45(1): 66. DING Yuchong, HE Jie, CHEN Zheming, LONG Yong, MAO Shiping, MA Jinyi. Single-Crystal LiTaO3 Composite Film Material on Si Substrate and Its Applications[J]. Piezoelectrics & Acoustooptics, 2023, 45(1): 66.