复合氮化铝压电薄膜研制及其应用
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陈运祥, 赵雪梅, 郑泽渔, 陶毅, 伍平, 田亚睿, 张永川, 许东辉. 复合氮化铝压电薄膜研制及其应用[J]. 压电与声光, 2020, 42(5): 628. CHEN Yunxiang, ZHAO Xuemei, ZHENG Zeyu, TAO Yi, WU Ping, TIAN Yarui, ZHANG Yongchuan, XU Donghui. Preparation and Application of Composite AlN Piezoelectric Films[J]. Piezoelectrics & Acoustooptics, 2020, 42(5): 628.