中国激光, 2021, 48 (4): 0401007, 网络出版: 2021-02-08
高能激光单晶硅反射镜纳米精度控形控性制造技术 下载: 1370次特邀综述
Nanoprecision Control of Shape and Performance Manufacturing Technology for High-Energy Laser Silicon Components
补充材料
石峰, 田野, 乔硕, 周光奇, 宋辞, 薛帅, 铁贵鹏, 周林, 舒勇, 周港. 高能激光单晶硅反射镜纳米精度控形控性制造技术[J]. 中国激光, 2021, 48(4): 0401007. Feng Shi, Ye Tian, Shuo Qiao, Guangqi Zhou, Ci Song, Shuai Xue, Guipeng Tie, Lin Zhou, Yong Shu, Gang Zhou. Nanoprecision Control of Shape and Performance Manufacturing Technology for High-Energy Laser Silicon Components[J]. Chinese Journal of Lasers, 2021, 48(4): 0401007.