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基于白光干涉频域分析的高精度表面形貌测量

High-Resolution Surface Topography Measurement Based on Frequency-Domain Analysis in White Light Interferometry

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摘要

提出了一种基于空间频域分析的白光干涉测量算法,该算法通过消除相位信息中的2π模糊来实现高精度的表面形貌测量。在频域分析中可以同时提取样品的相干形貌和相位形貌。相干形貌虽然不受2π模糊的影响,但是包含测量误差,精度较低。相位形貌虽然能够实现较高精度的表面形貌测量,但存在2π模糊问题。因此采用相干信息与相位信息相结合的方式来消除相位信息中的2π模糊。此外,针对由背景噪声和光源扰动所引起的局部相位突变,提出了相邻像素点差分分析方法,有效消除了局部相位突变,从而提高了测量的稳定性。该方法不需要复杂的计算,工作效率较高。分别从理论和实验两个方面进行分析,以验证提出方法的有效性。

Abstract

A white-light interference algorithm based on spatial frequency-domain analysis is described, which permits a high-resolution surface measurement by removing 2π ambiguity contained in phase information. In the frequency domain analysis, we can extract the coherence and phase profiles simultaneously, where the coherence profile is free of 2π ambiguity but contains the measurement errors caused by background noises, while the phase profile is precisely the opposite. By combining the coherence and phase information, we remove the 2π ambiguity contained in phase information successfully. In addition, a differential analysis method between adjacent pixels is adopted to deal with the local 2π phase-jump errors, which are caused by the background noises and the light source fluctuations. This technique is highly efficient since it does not require enormous computation. Both theories and experiments are elaborated in detail to verify the validity and stability of this method.

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中图分类号:TH741

DOI:10.3788/cjl201845.0604001

所属栏目:测量与计量

基金项目:国家自然科学基金(61675206,61605212,61604154)

收稿日期:2017-11-22

修改稿日期:2017-12-18

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邓钦元:中国科学院光电技术研究所微细加工光学技术国家重点实验室, 四川 成都 610209中国科学院大学, 北京 100049
唐燕:中国科学院光电技术研究所微细加工光学技术国家重点实验室, 四川 成都 610209
周毅:中国科学院光电技术研究所微细加工光学技术国家重点实验室, 四川 成都 610209中国科学院大学, 北京 100049
杨勇:中国科学院光电技术研究所微细加工光学技术国家重点实验室, 四川 成都 610209
胡松:中国科学院光电技术研究所微细加工光学技术国家重点实验室, 四川 成都 610209

联系人作者:唐燕(ty0513@163.com)

备注:邓钦元(1990—),男,博士研究生,主要从事微纳结构光刻加工及其形貌测量方面的研究。E-mail: dqy_storm@163.com

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引用该论文

Deng Qinyuan,Tang Yan,Zhou Yi,Yang Yong,Hu Song. High-Resolution Surface Topography Measurement Based on Frequency-Domain Analysis in White Light Interferometry[J]. Chinese Journal of Lasers, 2018, 45(6): 0604001

邓钦元,唐燕,周毅,杨勇,胡松. 基于白光干涉频域分析的高精度表面形貌测量[J]. 中国激光, 2018, 45(6): 0604001

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