基于新型金属卤化物半导体和闪烁体的X射线探测与成像研究进展

马文博; 匡翠方; 刘旭; 杨旸

doi:doi:10.3788/AOS202242.1704002

光学学报, 2022, 42 (17): 1704002, 网络出版: 2022-09-16

基于新型金属卤化物半导体和闪烁体的X射线探测与成像研究进展下载： 2122次特邀综述

Research Progress of X-Ray Detection and Imaging Based on Emerging Metal Halide Semiconductors and Scintillators

马文博匡翠方刘旭杨旸 ^*

作者单位

浙江大学光电科学与工程学院现代光学仪器国家重点实验室，浙江杭州 310027

图 & 表

图 1. X射线的光子能量范围及一些应用^［26］

Fig. 1. Range of X-ray photon energy and some applications^[26]

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图 2. 光电吸收过程示意图^［27］

Fig. 2. Schematic diagram of photoelectric absorption process^[27]

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图 3. 半导体X射线探测器的两种工作模式^［29］

Fig. 3. Two working modes of semiconductor X-ray detectors^[29]

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图 4. 一些代表性半导体材料的线性吸收系数随X射线光子能量的变化^［33］

Fig. 4. Linear absorption coefficients varying with photon energy for some representative semiconductors^[33]

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图 5. X射线间接型探测的基本过程^［36］

Fig. 5. Basic process of indirect X-ray detection^[36]

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图 6. X射线间接型探测的三个阶段^［42］

Fig. 6. Three stages of indirect X-ray detection^[42]

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图 7. FPXI单个像素示意图^［30］

Fig. 7. Schematic diagram of single pixel of FPXI^[30]

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图 8. 锐利边缘的X射线图像^［51］

Fig. 8. X-ray image of sharp edge^[51]

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图 9. 闪烁体与相机芯片的两种耦合方式。（a）透镜光学系统；（b）光纤板

Fig. 9. Two coupled methods between scintillator screen and camera chip. (a) Optical system of lens; (b) fiber optic plate

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图 10. X射线CT系统示意图^［7］

Fig. 10. Schematic diagram of X-ray CT system^[7]

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图 11. 基于a-Se的X射线直接型成像^［30］。（a）AX-2430型FPXI；（b）手部X射线照片

Fig. 11. X-ray direct imaging based on a-Se^[30]. (a) AX-2430 type FPXI; (b) X-ray image of hand

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图 12. 钙钛矿单晶X射线直接型探测与成像。（a）MAPbI₃单晶^［74］；（b）MAPbBr₃单晶与Si集成^［20］；（c）“N”字母X射线成像^［20］

Fig. 12. X-ray direct detection and imaging based on perovskite single crystal. (a) MAPbI₃ single crystal^[74]; (b) integration of MAPbI₃ single crystal and Si^[20]; (c) X-ray imaging of letter "N"^[20]

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图 13. 双钙钛矿单晶X射线直接型探测^［18］。（a）Cs₂AgBiBr₆单晶；（b）最低检测极限测试结果

Fig. 13. X-ray direct detection based on double perovskite single crystal^[18]. (a) Cs₂AgBiBr₆ single crystal; (b) test results of lowest detection limit

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图 14. 钙钛矿多晶X射线直接型探测与成像。（a）多晶钙钛矿太阳能电池^［22］；（b）树叶X射线图像^［22］；（c）钙钛矿FPXI^［21］；（d）手部X射线图像^［21］

Fig. 14. X-ray direct detection and imaging based on perovskite polycrystal. (a) Polycrystalline perovskite solar cells^[22]; (b) X-ray image of leaf^[22]; (c) perovskite FPXI^[21]; (d) X-ray image of hand^[21]

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图 15. 钙钛矿多晶膜制备工艺。（a）多晶MAPbI₃晶圆及探测器结构^［93］；（b）Cs₂AgBiBr₆多晶圆片^［83］；（c）成像结果^［83］

Fig. 15. Manufacturing technique of perovskite polycrystal film. (a) MAPbI₃ polycrystal wafer and structure of detector^[93];(b) Cs₂AgBiBr₆ polycrystal wafer^[83]; (c) imaging results^[83]

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图 16. 传统间接型X射线成像系统。（a）胸部X射线成像系统^［7］；（b）CsI针状结构^［37］；（c）CsI∶Tl晶体蒸发在TFT上^［36］；（d）两类闪烁体中的散射差异^［39］

Fig. 16. Traditional indirect X-ray imaging system. (a) Chest X-ray imaging system^[7]; (b) acicular structure of CsI^[37]; (c) evaporation of CsI∶Tl crystals on TFT^[36]; (d) difference of scattering between two kinds of scintillators^[39]

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图 17. 其他传统闪烁体。（a）CT系统中的玻璃闪烁体与探测器阵列^［7］；（b）SrI₂∶Eu闪烁体^［39］；（c）LuAG∶Ce闪烁体^［39］

Fig. 17. Other traditional scintillators. (a) Glass scintillators and detector array in CT system^[7]; (b) SrI₂∶Eu scintillators^[39]; (c) LuAG∶Ce scintillators^[39]

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图 18. 二维钙钛矿闪烁体。（a）（Phe）₂PbBr₄晶体^［108］；（b）亚纳秒时间分辨^［109］；（c）无铅二维钙钛矿闪烁体的成像演示^［121］

Fig. 18. Two-dimensional perovskite scintillators. (a) (Phe)₂PbBr₄ crystal^[108]; (b) sub-nanosecond time resolution^[109]; (c) imaging demonstration of lead-free two-dimensional perovskite scintillators^[121]

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图 19. 无机钙钛矿纳米晶闪烁体。（a）CsPbX₃全无机钙钛矿纳米晶闪烁体的辐射发光（RL）光谱^［23］；（b）基于钙钛矿纳米晶闪烁体的间接型X射线成像仪^［23］；（c）CsPbBr₃和GOS薄膜的成像分辨率对比^［123］；（d）高含量CsPbBr₃纳米片溶液及制成的大面积薄膜^［124］；（e）CsPbBr₃@Cs₄PbBr₆结构示意图^［24］

Fig. 19. Inorganic perovskite nanocrystal scintillators. (a) RL spectra of CsPbX₃ all-inorganic perovskite nanocrystal scintillators^[23]; (b) indirect X-ray imager based on perovskite nanocrystal scintillators^[23]; (c) comparison of imaging resolution between CsPbBr₃ and GOS films^[123]; (d) high-concent CsPbBr₃ nanosheet solution and large area film^[124]; (e) structural schematic of CsPbBr₃@Cs₄PbBr₆^[24]

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图 20. 无机钙钛矿纳米晶闪烁体的改进。（a）钙钛矿玻璃闪烁体^［126］；（b）玻璃闪烁体在高温高湿环境下的稳定性测试^［126］；（c）玻璃闪烁体的高分辨率（约15 lp/mm）^［126］；（d）CsPbBr₃液体闪烁体示意图及相应的成像演示^［129］

Fig. 20. Improvement of inorganic perovskite nanocrystal scintillators. (a) Perovskite glass scintillators^[126]; (b) stability test of glass scintillators under high temperature and high humidity^[126]; (c) high resolution of glass scintillators (~15 lp/mm)^[126]; (d) schematic diagram of CsPbBr₃ liquid scintillators and corresponding imaging demonstration^[129]

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图 21. CsPbBr₃的自吸收效应及应对方案。（a）CsPbBr₃的自吸收效应^［131］；（b）CsPbBr₃与有机发光物质耦合形成塑料闪烁体^［133］

Fig. 21. Self-absorption effect of CsPbBr₃ and corresponding solution. (a) Self-absorption effect of CsPbBr₃^[131]; (b) CsPbBr₃ is coupled with organic luminescent materials to form plastic scintillators^[133]

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图 22. 其他钙钛矿或卤化物闪烁体。（a）Cs₂NaTbCl₆晶体结构及粉末照片^［135］；（b）Cs₂Ag_0.6Na_0.4In_1-_yBi_yCl₆晶格结构^［25］；（c）Cs₂Ag_0.6Na_0.4In_1-_yBi_yCl₆的大斯托克斯位移^［25］；（d）CsI∶Tl与Cs₂Ag_0.6Na_0.4In_1-_yBi_yCl₆的衰减寿命对照^［25］

Fig. 22. Other perovskite or halide scintillators. (a) Crystal structure and powder photo of Cs₂NaTbCl₆^[135]; (b) lattice structure of Cs₂Ag_0.6Na_0.4In_1-_yBi_yCl₆^[25]; (c) large Stokes shift of Cs₂Ag_0.6Na_0.4In_1-_yBi_yCl₆^[25]; (d) comparison of decay lifetime between CsI∶Tl and Cs₂Ag_0.6Na_0.4In_1-_yBi_yCl₆^[25]

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马文博, 匡翠方, 刘旭, 杨旸. 基于新型金属卤化物半导体和闪烁体的X射线探测与成像研究进展[J]. 光学学报, 2022, 42(17): 1704002. Wenbo Ma, Cuifang Kuang, Xu Liu, Yang Yang. Research Progress of X-Ray Detection and Imaging Based on Emerging Metal Halide Semiconductors and Scintillators[J]. Acta Optica Sinica, 2022, 42(17): 1704002.

基于新型金属卤化物半导体和闪烁体的X射线探测与成像研究进展 下载： 2122次特邀综述

图 1. X射线的光子能量范围及一些应用［26］

Fig. 1. Range of X-ray photon energy and some applications[26]

图 2. 光电吸收过程示意图［27］

Fig. 2. Schematic diagram of photoelectric absorption process[27]

图 3. 半导体X射线探测器的两种工作模式［29］

Fig. 3. Two working modes of semiconductor X-ray detectors[29]

图 4. 一些代表性半导体材料的线性吸收系数随X射线光子能量的变化［33］

Fig. 4. Linear absorption coefficients varying with photon energy for some representative semiconductors[33]

图 5. X射线间接型探测的基本过程［36］

Fig. 5. Basic process of indirect X-ray detection[36]

图 6. X射线间接型探测的三个阶段［42］

Fig. 6. Three stages of indirect X-ray detection[42]

图 7. FPXI单个像素示意图［30］

Fig. 7. Schematic diagram of single pixel of FPXI[30]

图 8. 锐利边缘的X射线图像［51］

Fig. 8. X-ray image of sharp edge[51]

图 9. 闪烁体与相机芯片的两种耦合方式。（a）透镜光学系统；（b）光纤板

Fig. 9. Two coupled methods between scintillator screen and camera chip. (a) Optical system of lens; (b) fiber optic plate

图 10. X射线CT系统示意图［7］

Fig. 10. Schematic diagram of X-ray CT system[7]

图 11. 基于a-Se的X射线直接型成像［30］。（a）AX-2430型FPXI；（b）手部X射线照片

Fig. 11. X-ray direct imaging based on a-Se[30]. (a) AX-2430 type FPXI; (b) X-ray image of hand

图 12. 钙钛矿单晶X射线直接型探测与成像。（a）MAPbI3单晶［74］；（b）MAPbBr3单晶与Si集成［20］；（c）“N”字母X射线成像［20］

Fig. 12. X-ray direct detection and imaging based on perovskite single crystal. (a) MAPbI3 single crystal[74]; (b) integration of MAPbI3 single crystal and Si[20]; (c) X-ray imaging of letter "N"[20]

图 13. 双钙钛矿单晶X射线直接型探测［18］。（a）Cs2AgBiBr6单晶；（b）最低检测极限测试结果

Fig. 13. X-ray direct detection based on double perovskite single crystal[18]. (a) Cs2AgBiBr6 single crystal; (b) test results of lowest detection limit

图 14. 钙钛矿多晶X射线直接型探测与成像。（a）多晶钙钛矿太阳能电池［22］；（b）树叶X射线图像［22］；（c）钙钛矿FPXI［21］；（d）手部X射线图像［21］

Fig. 14. X-ray direct detection and imaging based on perovskite polycrystal. (a) Polycrystalline perovskite solar cells[22]; (b) X-ray image of leaf[22]; (c) perovskite FPXI[21]; (d) X-ray image of hand[21]

图 15. 钙钛矿多晶膜制备工艺。（a）多晶MAPbI3晶圆及探测器结构［93］；（b）Cs2AgBiBr6多晶圆片［83］；（c）成像结果［83］

Fig. 15. Manufacturing technique of perovskite polycrystal film. (a) MAPbI3 polycrystal wafer and structure of detector[93];(b) Cs2AgBiBr6 polycrystal wafer[83]; (c) imaging results[83]

图 16. 传统间接型X射线成像系统。（a）胸部X射线成像系统［7］；（b）CsI针状结构［37］；（c）CsI∶Tl晶体蒸发在TFT上［36］；（d）两类闪烁体中的散射差异［39］

Fig. 16. Traditional indirect X-ray imaging system. (a) Chest X-ray imaging system[7]; (b) acicular structure of CsI[37]; (c) evaporation of CsI∶Tl crystals on TFT[36]; (d) difference of scattering between two kinds of scintillators[39]

图 17. 其他传统闪烁体。（a）CT系统中的玻璃闪烁体与探测器阵列［7］；（b）SrI2∶Eu闪烁体［39］；（c）LuAG∶Ce闪烁体［39］

Fig. 17. Other traditional scintillators. (a) Glass scintillators and detector array in CT system[7]; (b) SrI2∶Eu scintillators[39]; (c) LuAG∶Ce scintillators[39]

图 18. 二维钙钛矿闪烁体。（a）（Phe）2PbBr4晶体［108］；（b）亚纳秒时间分辨［109］；（c）无铅二维钙钛矿闪烁体的成像演示［121］

Fig. 18. Two-dimensional perovskite scintillators. (a) (Phe)2PbBr4 crystal[108]; (b) sub-nanosecond time resolution[109]; (c) imaging demonstration of lead-free two-dimensional perovskite scintillators[121]

图 21. CsPbBr3的自吸收效应及应对方案。（a）CsPbBr3的自吸收效应［131］；（b）CsPbBr3与有机发光物质耦合形成塑料闪烁体［133］

Fig. 21. Self-absorption effect of CsPbBr3 and corresponding solution. (a) Self-absorption effect of CsPbBr3[131]; (b) CsPbBr3 is coupled with organic luminescent materials to form plastic scintillators[133]

图 22. 其他钙钛矿或卤化物闪烁体。（a）Cs2NaTbCl6晶体结构及粉末照片［135］；（b）Cs2Ag0.6Na0.4In1-yBiyCl6晶格结构［25］；（c）Cs2Ag0.6Na0.4In1-yBiyCl6的大斯托克斯位移［25］；（d）CsI∶Tl与Cs2Ag0.6Na0.4In1-yBiyCl6的衰减寿命对照［25］

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基于新型金属卤化物半导体和闪烁体的X射线探测与成像研究进展下载： 2122次特邀综述

图 1. X射线的光子能量范围及一些应用^［26］

Fig. 1. Range of X-ray photon energy and some applications^[26]

图 2. 光电吸收过程示意图^［27］

Fig. 2. Schematic diagram of photoelectric absorption process^[27]

图 3. 半导体X射线探测器的两种工作模式^［29］

Fig. 3. Two working modes of semiconductor X-ray detectors^[29]

图 4. 一些代表性半导体材料的线性吸收系数随X射线光子能量的变化^［33］

Fig. 4. Linear absorption coefficients varying with photon energy for some representative semiconductors^[33]

图 5. X射线间接型探测的基本过程^［36］

Fig. 5. Basic process of indirect X-ray detection^[36]

图 6. X射线间接型探测的三个阶段^［42］

Fig. 6. Three stages of indirect X-ray detection^[42]

图 7. FPXI单个像素示意图^［30］

Fig. 7. Schematic diagram of single pixel of FPXI^[30]

图 8. 锐利边缘的X射线图像^［51］

Fig. 8. X-ray image of sharp edge^[51]

图 10. X射线CT系统示意图^［7］

Fig. 10. Schematic diagram of X-ray CT system^[7]

图 11. 基于a-Se的X射线直接型成像^［30］。（a）AX-2430型FPXI；（b）手部X射线照片

Fig. 11. X-ray direct imaging based on a-Se^[30]. (a) AX-2430 type FPXI; (b) X-ray image of hand

图 12. 钙钛矿单晶X射线直接型探测与成像。（a）MAPbI₃单晶^［74］；（b）MAPbBr₃单晶与Si集成^［20］；（c）“N”字母X射线成像^［20］

Fig. 12. X-ray direct detection and imaging based on perovskite single crystal. (a) MAPbI₃ single crystal^[74]; (b) integration of MAPbI₃ single crystal and Si^[20]; (c) X-ray imaging of letter "N"^[20]

图 13. 双钙钛矿单晶X射线直接型探测^［18］。（a）Cs₂AgBiBr₆单晶；（b）最低检测极限测试结果

Fig. 13. X-ray direct detection based on double perovskite single crystal^[18]. (a) Cs₂AgBiBr₆ single crystal; (b) test results of lowest detection limit

图 14. 钙钛矿多晶X射线直接型探测与成像。（a）多晶钙钛矿太阳能电池^［22］；（b）树叶X射线图像^［22］；（c）钙钛矿FPXI^［21］；（d）手部X射线图像^［21］

Fig. 14. X-ray direct detection and imaging based on perovskite polycrystal. (a) Polycrystalline perovskite solar cells^[22]; (b) X-ray image of leaf^[22]; (c) perovskite FPXI^[21]; (d) X-ray image of hand^[21]

图 15. 钙钛矿多晶膜制备工艺。（a）多晶MAPbI₃晶圆及探测器结构^［93］；（b）Cs₂AgBiBr₆多晶圆片^［83］；（c）成像结果^［83］

Fig. 15. Manufacturing technique of perovskite polycrystal film. (a) MAPbI₃ polycrystal wafer and structure of detector^[93];(b) Cs₂AgBiBr₆ polycrystal wafer^[83]; (c) imaging results^[83]

图 16. 传统间接型X射线成像系统。（a）胸部X射线成像系统^［7］；（b）CsI针状结构^［37］；（c）CsI∶Tl晶体蒸发在TFT上^［36］；（d）两类闪烁体中的散射差异^［39］

Fig. 16. Traditional indirect X-ray imaging system. (a) Chest X-ray imaging system^[7]; (b) acicular structure of CsI^[37]; (c) evaporation of CsI∶Tl crystals on TFT^[36]; (d) difference of scattering between two kinds of scintillators^[39]

图 17. 其他传统闪烁体。（a）CT系统中的玻璃闪烁体与探测器阵列^［7］；（b）SrI₂∶Eu闪烁体^［39］；（c）LuAG∶Ce闪烁体^［39］

Fig. 17. Other traditional scintillators. (a) Glass scintillators and detector array in CT system^[7]; (b) SrI₂∶Eu scintillators^[39]; (c) LuAG∶Ce scintillators^[39]

图 18. 二维钙钛矿闪烁体。（a）（Phe）₂PbBr₄晶体^［108］；（b）亚纳秒时间分辨^［109］；（c）无铅二维钙钛矿闪烁体的成像演示^［121］

Fig. 18. Two-dimensional perovskite scintillators. (a) (Phe)₂PbBr₄ crystal^[108]; (b) sub-nanosecond time resolution^[109]; (c) imaging demonstration of lead-free two-dimensional perovskite scintillators^[121]

图 21. CsPbBr₃的自吸收效应及应对方案。（a）CsPbBr₃的自吸收效应^［131］；（b）CsPbBr₃与有机发光物质耦合形成塑料闪烁体^［133］

Fig. 21. Self-absorption effect of CsPbBr₃ and corresponding solution. (a) Self-absorption effect of CsPbBr₃^[131]; (b) CsPbBr₃ is coupled with organic luminescent materials to form plastic scintillators^[133]