为了制备石英晶体谐振器，在石英衬底上采用光刻和电感耦合等离子刻蚀技术制备台阶形貌，研究了制备过程中激励电源功率、偏压电源功率以及导热物质等工艺参数对刻蚀效果的影响。并且利用扫描电子显微镜对刻蚀图形的表面形貌进行了观察，通过实验与分析得到了符合工业生产要求的工艺参数。最后在最优工艺参数条件下，制得了高约22 μm的整齐的台阶形貌，并将干法刻蚀的结果与湿法刻蚀对比，展现了干法刻蚀的特点以及干法刻蚀应用于工业化生产石英晶体谐振器的潜力。

针对目前双面微器件加工方法步骤繁琐、效率低的问题，提出基于改进Gerchberg-Saxton（GS）算法的全息双面光刻方法，使用单个光源在玻璃基底的上下表面同时曝光，进行双面图形的制作。该方法通过计算不同轴向位置图案对应的组合全息图，并将其加载到空间光调制器（LCOS-SLM）上，对入射光场进行调制，从而在目标空间内实现双面图形重现。采用改进GS算法对距离焦面2 mm处的图案A与距离焦面4.06 mm处的图案B进行全息图计算与仿真重建。搭建实验装置，对3 mm厚透明石英玻璃基底的上下表面同时曝光，且对光场生成过程中的散斑、杂散光及串扰问题做出分析并提出解决方案，最终实现60 μm线宽双层图案曝光，验证了所提方法进行双面光刻的可行性。所提方法使用单张全息图和单个光源，通过单次曝光即可在目标体积内生成多层任意图形，极大地简化了双面图形制作的步骤。

Actin cytoskeleton plays crucial roles in various cellular functions. Extracellular matrix (ECM) can modulate cell morphology by remodeling the internal cytoskeleton. To define how geometry of ECM regulates the organization of actin cytoskeleton, we plated individual NIH 3T3 cells on micropatterned substrates with distinct shapes and sizes. It was found that the stress fibers could form along the nonadhesive edges of T-shaped pattern, but were absent from the opening edge of V-shaped pattern, indicating that the organization of actin cytoskeleton was dependent on the mechanical environment. Furthermore, a secondary actin ring was observed on 50μm circular pattern while did not appear on 30μm and 40μm pattern, showing a size-dependent organization of actin cytoskeleton. Finally, osteoblasts, MDCK and A549 cells exhibited distinct organization of actin cytoskeleton on T-shaped pattern, suggesting a cell-type specificity in arrangement of actin cytoskeleton. Together, our findings brought novel insight into the organization of actin cytoskeleton on micropatterned environments.Actin cytoskeleton plays crucial roles in various cellular functions. Extracellular matrix (ECM) can modulate cell morphology by remodeling the internal cytoskeleton. To define how geometry of ECM regulates the organization of actin cytoskeleton, we plated individual NIH 3T3 cells on micropatterned substrates with distinct shapes and sizes. It was found that the stress fibers could form along the nonadhesive edges of T-shaped pattern, but were absent from the opening edge of V-shaped pattern, indicating that the organization of actin cytoskeleton was dependent on the mechanical environment. Furthermore, a secondary actin ring was observed on 50μm circular pattern while did not appear on 30μm and 40μm pattern, showing a size-dependent organization of actin cytoskeleton. Finally, osteoblasts, MDCK and A549 cells exhibited distinct organization of actin cytoskeleton on T-shaped pattern, suggesting a cell-type specificity in arrangement of actin cytoskeleton. Together, our findings brought novel insight into the organization of actin cytoskeleton on micropatterned environments.

离轴照明技术是光刻工艺中提高成像分辨率的关键技术之一。本文提出了一种基于傅里叶合成技术的照明系统，该系统能够实现任意照明模式，并可以提高成像数值孔径，同时具有灵活高效、能量利用率高、易于实现等优点。本课题组通过计算仿真和搭建的实验装置验证了傅里叶合成技术实现任意照明模式的可行性，掌握了傅里叶照明系统所需的数值孔径合成方法，实现照明所需的发散度。基于优化的照明程序版图在实验中实现了圆盘、二级、四极、环形等照明模式，这些照明模式光强分布较均匀且照明形状无畸变。当MEMS二维振镜的扫描角度为±1°且选用收集镜成像倍率为10时，在收集镜上可以实现最大扫描照明尺寸超过30 mm，焦点面上的4×NA值超过0.6，这一结果可以匹配当前及下一代光刻工艺及掩模检测应用的照明需求。

设计了两种具有不同参数的光刻掩模版，利用光刻技术制备了两种微米级双层复合结构。研究了曝光能量对凹形缺口深度的影响，同时采用有限差分时域法分析了掩模版曝光时的光场分布情况，阐明了微米级双层复合结构形成的物理机理。实验结果表明：通过调整曝光能量的大小，能够有效地控制凹形缺口的深度。对8 μm厚的AZ9260光刻胶来说，不高于160 mJ/cm²的曝光能量是制备出微米级双层复合结构的关键。该技术在制备微米尺寸的分层器件方面有着潜在的应用前景。

In this report, we demonstrate a novel technique for the microscopic patterning of gold by combining the photoreduction of AuIIIBr4 - to AuIBr2 - and the electrochemical reduction of AuIBr2 - to elemental gold in a single step within solution. While mask-based methods have been the norm for electroplating, the adoption of direct laser writing for flexible, real-time patterning has not been widespread. Through irradiation using a 405 nm laser and applying a voltage corresponding to a selective potential window specific to AuIBr2 -, we have shown that we can locally deposit elemental gold at the focal point of the laser. In addition to demonstrating the feasibility of the technique, we have collected data on the kinetics of the photoreduction reaction in ethanol and have deduced its rate law. We have confirmed the selective deposition of AuIBr2 - within a potential window through controlled potential electrolysis experiments and through direct measurement on a quartz crystal microbalance. Finally, we have verified local deposition through scanning electron microscopy.

将光电性能优异、可通过低温溶液法制备的卤化物钙钛矿制成阵列型光电探测器, 必将推动其在成像、光通信等领域中的应用。然而, 卤化物钙钛矿易被常规溶剂 (包括显影液) 溶解, 导致其与光刻工艺不兼容。自组装单分子疏水层结合光刻工艺的亲水-疏水图形基底制备方法能解决制备过程中极性溶剂与钙钛矿材料不兼容的问题, 通过简单的旋涂 (极性钙钛矿前驱体溶液仅在亲水图形区域浸润)、低温退火, 可以快速获得钙钛矿阵列。CH3NH3PbI3 薄膜阵列光电探测器具有良好的光电性能, 530 nm 光辐照下探测率为 4.7×1011 Jones, 响应度为 0.055 A/W。这项工作为制备图案可控的钙钛矿薄膜阵列光电探测器提供了一种简单而有效的策略。

声表面波(SAW)器件光刻过程中，制作的光刻胶线条宽度与掩模版不一致，特别是不同宽度的非均匀线条光刻后线宽变化值存在偏差。该文研究了接近式曝光衍射效应对线宽的影响，分析了掩模版上线条和缝隙宽度、衍射光强、掩模版与光刻胶间距等参数间的关系。结果表明，通过建立光学模型给出了计算曝光后不同线条宽度变化值的方法，采用程序编程可对掩模版数据中不同尺寸的线条和缝隙宽度进行补偿，实现SAW器件非均匀线条宽度的精确控制。