作者单位
摘要
华东师范大学 精密光谱科学与技术国家重点实验室,上海 200241
为了制备高质量表面周期结构,利用法布里-珀罗腔对飞秒激光进行时域整形,输出子脉冲间隔在1~300 ps内灵活可调的飞秒激光脉冲串,在硅表面诱导亚波长周期条纹。实验结果显示,利用飞秒激光脉冲串诱导得到的亚波长周期条纹明显优于原始高斯光诱导的亚波长周期条纹。利用子脉冲间隔为100 ps的脉冲串诱导的亚波长条纹最佳,条纹周期为1 008 nm,结构取向角为2.8°,边缘粗糙度为3.9 nm,可达到光刻工艺的标准。
激光加工 激光诱导表面周期结构 亚波长周期条纹 法布里-珀罗腔 飞秒激光脉冲串  Laser processing Laser induced periodic surface structures Near-subwavelength ripples Fabry-Perot cavity Femtosecond laser pulse train Si 
光子学报
2023, 52(7): 0752301
作者单位
摘要
光子学报
2023, 52(7): 0752300
Author Affiliations
Abstract
1 State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China
2 Zhejiang Lab, Hangzhou 311100, China
3 State Key Laboratory of Precision Spectroscopy, School of Physics and Electronic Science, East China Normal University, Shanghai 200241, China
4 CAS Center for Excellence in Ultra-Intense Laser Science, Chinese Academy of Sciences, Shanghai 201800, China
Printing stable color with a lithography-free and environment-friendly technique is in high demand for applications. We report a facile strategy of ultrafast laser direct writing (ULDW) to produce large-scale embedded structural colors inside transparent solids. The diffraction effect of gratings enables effective generation of structural colors across the entire visible spectrum. The structural colors inside the fused silica glass have been demonstrated to exhibit excellent thermal stability under high temperature up to 1200°C, which promises that the written information can be stable for long time even with unlimited lifetime at room temperature. The structural colors in the applications of coloring, anti-counterfeiting, and information storage are also demonstrated. Our studies indicate that the presented ULDW allows for fabricating large-scale and high thermal-stability structural colors with prospects of three-dimensional patterning, which will find various applications, especially under harsh conditions such as high temperature.
ultrafast laser direct writing structural color glass information storage 
Chinese Optics Letters
2022, 20(3): 030501
作者单位
摘要
华东师范大学 精密光谱科学与技术国家重点实验室, 上海200241
为了改善高能流密度飞秒激光的烧蚀质量,使用法布里珀罗腔产生子脉冲间隔在1~3 500 ps内连续可调的飞秒激光脉冲序列,系统探究了单个飞秒高斯脉冲与不同脉冲间隔的脉冲序列在硅上烧蚀的孔型质量。实验结果显示,子脉冲间隔在50~100 ps范围内时,孔边缘的冠状重熔物大大减少,其厚度仅为单个飞秒高斯脉冲的40%,周围基底几乎没有粘连的粉尘或热损伤痕迹,孔型品质因子数值从单个飞秒脉冲的0.52提升至0.89。本文报道的飞秒激光脉冲序列,基于后续子脉冲与喷出物的二次烧蚀原理,子脉冲间隔在50~100 ps范围内时,后续子脉冲能够最大程度的雾化喷出物,从而减少冠状重熔物与高温粉尘污染损伤,烧蚀质量得到改善。
飞秒激光 高能流密度 脉冲序列 法布里珀罗腔  激光烧蚀 加工质量 重熔 粉尘 Femtosecond laser High energy density Pulse train Fabry-Perot cavity Silicon Laser ablation Ablation quality Redeposition Dust 
光子学报
2021, 50(6): 108
作者单位
摘要
1 华东师范大学 精密光谱科学与技术国家重点实验室,上海20024
2 上海电机学院 文理学院,上海01306
利用飞秒激光双光束干涉技术,结合柱透镜线扫描技术,在30 s内制备了面积为10 mm×10 mm的微米-纳米复合结构,极大地提升了激光加工效率。飞秒激光刻蚀后的硅表面包含双光束干涉引起的长周期微米结构,以及飞秒激光诱导的纳米周期结构。微米-纳米复合结构极大地提升了表面粗糙度,在毛细效应的作用下,硅在空气中显示出超亲水性,接触角从40°降为0°。测量烧蚀前后硅表面的X射线光电子能谱,发现激光加工后硅表面的Si-OH和H2O分子的含量分别增加22.3%和13.6%,这进一步增强了硅表面的亲水性。随着激光照射功率的增加以及扫描速度的下降,硅表面接触角逐步下降。本文研究为高效制备大面积超亲水结构提供了新方法,在热传导、生物芯片等领域具有潜在的应用价值。
飞秒激光 双光束干涉  微米-纳米复合结构 超亲水 Femtosecond laser Two-beam interference Silicon Hybrid micro/nanostructures Superhydrophilicity 
光子学报
2021, 50(6): 100
作者单位
摘要
1 华东师范大学 精密光谱科学与技术国家重点实验室, 上海20024
2 深圳市坪山区同心外国语学校,广东深圳518118
基于空间光调制器的飞秒激光时空干涉方法,改变800 nm飞秒激光能流密度和累积脉冲数,在316镜面不锈钢上高效率、高质量地制备了面积为5 mm×5 mm的双尺度的类鲨鱼皮肤微纳米仿生结构,并研究了该结构在不同激光照射条件下的润湿性。在激光能流密度为1.37 J/cm2,累积脉冲数为30~40的条件下,不锈钢表面碳元素含量最多增加了13.22%,润湿性由亲水(接触角88°)转变为超疏水,接触角高达165°。本研究利用灵活、高效的飞秒激光时空干涉加工方法,得到了稳定的超疏水表面,为仿生结构制备提供了新思路。
飞秒激光 时空干涉 不锈钢 鲨鱼皮肤 仿生结构 润湿性 超疏水表面 Femtosecond laser Spatiotemporal interference Stainless steel Shark skin Biomimetic structures Wettability Super-hydrophobic surface 
光子学报
2021, 50(6): 91
作者单位
摘要
华东师范大学精密光谱科学与技术国家重点实验室,上海 200241
时空干涉的飞秒激光空间整形技术是一种新型图形化激光加工方法,相比传统技术更加简单灵活并有更高的效率。然而此技术中的缩束系统造成的成像畸变严重影响了加工的准确性。本文模拟并分析了该系统中的畸变现象,利用空间光调制器的相位全息图补偿畸变引起的空间光场的位置变化和光强分布不均。此方法可使曝光处干涉图案的最大偏移量由10.66 μm趋近于0,在实验中将相对最大偏差由60.42%降至8%以下,并使该处二维光强分布趋近于平顶光。该算法降低了时空干涉的飞秒激光空间整形技术对于缩束成像系统的设计需求,节省了成本与时间。基于以上方法,在不锈钢表面拼接加工出了1.5 mm×1.5 mm的具备多级别防伪能力的二维码图案。
激光器 飞秒激光整形 时空干涉 畸变校正 平顶光整形 微纳加工 
激光与光电子学进展
2021, 58(3): 0314002
Author Affiliations
Abstract
1 State Key Laboratory of Precision Spectroscopy, School of Physics and Electronic Science, East China Normal University, Shanghai 200241, China
2 Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China
Inhomogeneity and low efficiency are two important factors that hinder the wide application of laser-induced periodic surface structures. Two-beam interference is commonly used to fabricate gratings with interference periods. This study reports regular and uniform periodic ripples fabricated efficiently by the interference of two femtosecond laser beams via a cylindrical lens. The interference period is adjusted to be an integer multiple of the wavelength of a surface plasmon polariton. Regular and uniform subwavelength nanogratings (RUSNGs) on a silicon wafer of a diameter of 100 mm are fabricated with a scanning velocity of 6–9 mm/s. Bright and pure colors (including purple, blue, and red) are demonstrated on different patterns covered with RUSNGs.
subwavelength nanogratings two-beam interference surface plasmon polariton structural coloring 
Chinese Optics Letters
2020, 18(9): 093201
作者单位
摘要
华东师范大学精密光谱科学与技术国家重点实验室, 上海 200241
利用波长为532 nm、脉宽为90 ns的纳秒激光器,精密五轴运动系统,以及自主研发的计算机辅助制造程序,通过精确控制机械运动和激光辐照参数,在平面和自由曲面上制备了周期性亚波长条纹。研究了不同激光能流密度和扫描速率对条纹形成的影响,发现能流密度F=7.52 J/cm 2和扫描速率v=7 mm/s时,形成最佳条纹。结合激光偏振控制器件,发展了一种同步偏振控制技术,实现对激光偏振方向的同步控制,从而实现对条纹方向的精确操控。同时研究了不同的条纹方向对着色效果的影响。在此基础上,在不锈钢平板上制备了颜色鲜艳、外轮廓清晰的彩色图案,进一步实现了曲面上复杂图案的制备。
激光技术 周期性条纹 自由曲面 偏振控制 着色 
激光与光电子学进展
2020, 57(11): 111423
Author Affiliations
Abstract
1 State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China
2 Department of Mathematics and Physics, Shanghai Dianji University, Shanghai 201306, China
This Letter reports the formation of periodic surface structures on Ni–Fe film irradiated by a single femtosecond laser pulse. A concave lens with a focus length of 150 mm is placed in front of an objective (100×, NA=0.9), which transforms the Gaussian laser field into a ring distribution by the Fresnel diffraction. Periodic ripples form on the ablation area after the irradiation of a single femtosecond laser pulse, which depends on the laser polarization and laser fluence. We propose that the ring structure of the laser field leads to a similar transient distribution of the permittivity on the sample surface, which further launches the surface plasmon polaritons. The interaction of the incident laser with surface plasmon polaritons dominates the formation of periodic surface structures.
220.4241 Nanostructure fabrication 160.3900 Metals 240.6700 Surfaces 320.7090 Ultrafast lasers 
Chinese Optics Letters
2017, 15(2): 022201

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