耿娇 1,2严吉 1,2,3石理平 1,2,*
作者单位
摘要
1 西安电子科技大学杭州研究院,浙江 杭州 311231
2 西安电子科技大学光电工程学院,陕西 西安 710071
3 上海应用技术大学理学院,上海 201418
在金属铂和非晶硅构成的复合薄膜上,观察到了在斜入射条件下由s偏振激光诱导产生的、具有氧化周期性结构的、远离中轴线且外侧结构倾斜的周期性结构。首先,稳态照射下产生的条纹结构呈叶脉状,既不平行也不垂直于激光偏振方向;其次,动态扫描时产生的结构取向单一且与扫描方向有关;最后,结构周期随着入射角的增大而减小。这几个现象均与通常的激光烧蚀周期性结构不同。这些发现为调控激光诱导自组织提供了更多可能性。
激光诱导周期性表面结构 斜入射 纳米光栅 金属-半导体复合薄膜 
激光与光电子学进展
2024, 61(3): 0314001
石理平 1,*耿娇 1,**仇旻 2,3,***
作者单位
摘要
1 西安电子科技大学杭州研究院 先进光电成像与器件实验室,杭州 311231
2 西湖大学 工学院 浙江省3D微纳加工和表征研究重点实验室,杭州 310024
3 浙江西湖高等研究院 前沿技术研究所,杭州 310024
激光诱导周期性表面结构的质量可通过调整激光参数、改善材料表面和优化扫描策略等手段来提高。研究了扫描方向对线偏振激光诱导金属/硅复合薄膜表面氧化LIPSS的影响。结果表明,当扫描方向垂直于激光偏振方向时,纳米结构会出现分叉、不连续等问题;当扫描方向平行于激光偏振方向时,纳米结构呈现短程有序,但在光斑拼接处存在扭曲;而当扫描方向与激光偏振方向存在一定夹角时,容易获得长程均匀有序的周期性纳米结构。数值仿真结果表明造成这些现象的原因是近场效应对自组织过程具有不可忽略的影响。
激光诱导周期性表面结构 表面等离激元 激光诱导化学反应 复合薄膜 Laser-Induced Periodic Surface Structures(LIPSS) Surface plasmons Laser-induced oxidation Hybrid thin films 
光子学报
2023, 52(7): 0752303
作者单位
摘要
南方科技大学 机械与能源工程系,深圳 518055
激光诱导周期性表面结构(Laser-Induced Periodic Surface Structures,LIPSS)是一种在激光辐照下自发生成的超衍射极限结构,但其结构类型较为单一。提出了一种新型的二维图案化激光纳米加工方法,通过同时利用激光诱导的热效应及表面等离激元干涉,在正交的两个方向上分别形成褶皱和LIPSS两种周期性结构。这种方法仅通过单步辐照就能在薄膜材料表面生成二维褶皱LIPSS,从而丰富LIPSS的结构类型。同时,通过调整加工材料的膜厚或基底,以及改变入射激光波长或角度,可以分别调制二维纳米结构在两个正交方向上的周期。此外,通过激光偏振也可以调控该结构的取向。该方法能够进一步拓宽基于LIPSS的可加工表面纳米结构的种类及应用。
超快激光 激光诱导周期性表面结构 激光诱导褶皱 薄膜材料 二维纳米结构 飞秒激光 Ultrafast laser Laser-Induced Periodic Surface Structures(LIPSS) Laser-induced wrinkle Thin film materials 2D nanostructures Femtosecond laser 
光子学报
2023, 52(7): 0752302
作者单位
摘要
华东师范大学 精密光谱科学与技术国家重点实验室,上海 200241
为了制备高质量表面周期结构,利用法布里-珀罗腔对飞秒激光进行时域整形,输出子脉冲间隔在1~300 ps内灵活可调的飞秒激光脉冲串,在硅表面诱导亚波长周期条纹。实验结果显示,利用飞秒激光脉冲串诱导得到的亚波长周期条纹明显优于原始高斯光诱导的亚波长周期条纹。利用子脉冲间隔为100 ps的脉冲串诱导的亚波长条纹最佳,条纹周期为1 008 nm,结构取向角为2.8°,边缘粗糙度为3.9 nm,可达到光刻工艺的标准。
激光加工 激光诱导表面周期结构 亚波长周期条纹 法布里-珀罗腔 飞秒激光脉冲串  Laser processing Laser induced periodic surface structures Near-subwavelength ripples Fabry-Perot cavity Femtosecond laser pulse train Si 
光子学报
2023, 52(7): 0752301
作者单位
摘要
1 School of Physics and Technology, Wuhan University, Wuhan 430072, Hubei , China
2 State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China
3 The Institute of Technological Sciences, Wuhan University, Wuhan 430072, Hubei , China
Gallium nitride (GaN) has widespread applications in the semiconductor industry because of its desirable optoelectronic properties. The fabrication of surface structures on GaN thin films can effectively modify their optical and electrical properties, providing additional degrees of freedom for controlling GaN-based devices. Compared with lithography-based techniques, laser processing is maskless and much more efficient. This paper shows how surface micro-nano structures can be produced on GaN thin films using 355 nm nanosecond laser irradiation. The effects of the laser pulse energy, number of pulses, and polarization direction were studied. It was found that distinct micro-nano structures were formed under different irradiation conditions, and their geometries and elemental compositions were analyzed. The results indicate that different types of surface micro-nano structures can be produced on GaN thin films in a controllable manner using 355 nm nanosecond laser irradiation. The results of our study provide valuable guidance for the surface modification of GaN-based optoelectronic devices.Gallium nitride (GaN) has widespread applications in the semiconductor industry because of its desirable optoelectronic properties. The fabrication of surface structures on GaN thin films can effectively modify their optical and electrical properties, providing additional degrees of freedom for controlling GaN-based devices. Compared with lithography-based techniques, laser processing is maskless and much more efficient. This paper shows how surface micro-nano structures can be produced on GaN thin films using 355 nm nanosecond laser irradiation. The effects of the laser pulse energy, number of pulses, and polarization direction were studied. It was found that distinct micro-nano structures were formed under different irradiation conditions, and their geometries and elemental compositions were analyzed. The results indicate that different types of surface micro-nano structures can be produced on GaN thin films in a controllable manner using 355 nm nanosecond laser irradiation. The results of our study provide valuable guidance for the surface modification of GaN-based optoelectronic devices.
gallium nitride thin films nanosecond laser micro-nano structures laser-induced periodic surface structures 
激光与光电子学进展
2023, 60(7): 0714005
Author Affiliations
Abstract
Electrochemical oxidation/reduction of radicals is a green and environmentally friendly approach to generating fuels. These reactions, however, suffer from sluggish kinetics due to a low local concentration of radicals around the electrocatalyst. A large applied electrode potential can enhance the fuel generation efficiency via enhancing the radical concentration around the electrocatalyst sites, but this comes at the cost of electricity. Here, we report about a ~45% saving in energy to achieve an electrochemical hydrogen generation rate of 3×1016molecules cm–2s–1 (current density: 10 mA/cm2) through localized electric field-induced enhancement in the reagent concentration (LEFIRC) at laser-induced periodic surface structured (LIPSS) electrodes. The finite element model is used to simulate the spatial distribution of the electric field to understand the effects of LIPSS geometric parameters in field localization. When the LIPSS patterned electrodes are used as substrates to support Pt/C and RuO2electrocatalysts, the η10 overpotentials for HER and OER are decreased by 40.4 and 25%, respectively. Moreover, the capability of the LIPSS-patterned electrodes to operate at significantly reduced energy is also demonstrated in a range of electrolytes, including alkaline, acidic, neutral, and seawater. Importantly, when two LIPSS patterned electrodes were assembled as the anode and cathode into a cell, it requires 330 mVs of lower electric potential with enhanced stability over a similar cell made of pristine electrodes to drive a current density of 10 mA/cm2. This work demonstrates a physical and versatile approach of electrode surface patterning to boost electrocatalytic fuel generation performance and can be applied to any metal and semiconductor catalysts for a range of electrochemical reactions.Electrochemical oxidation/reduction of radicals is a green and environmentally friendly approach to generating fuels. These reactions, however, suffer from sluggish kinetics due to a low local concentration of radicals around the electrocatalyst. A large applied electrode potential can enhance the fuel generation efficiency via enhancing the radical concentration around the electrocatalyst sites, but this comes at the cost of electricity. Here, we report about a ~45% saving in energy to achieve an electrochemical hydrogen generation rate of 3×1016molecules cm–2s–1 (current density: 10 mA/cm2) through localized electric field-induced enhancement in the reagent concentration (LEFIRC) at laser-induced periodic surface structured (LIPSS) electrodes. The finite element model is used to simulate the spatial distribution of the electric field to understand the effects of LIPSS geometric parameters in field localization. When the LIPSS patterned electrodes are used as substrates to support Pt/C and RuO2electrocatalysts, the η10 overpotentials for HER and OER are decreased by 40.4 and 25%, respectively. Moreover, the capability of the LIPSS-patterned electrodes to operate at significantly reduced energy is also demonstrated in a range of electrolytes, including alkaline, acidic, neutral, and seawater. Importantly, when two LIPSS patterned electrodes were assembled as the anode and cathode into a cell, it requires 330 mVs of lower electric potential with enhanced stability over a similar cell made of pristine electrodes to drive a current density of 10 mA/cm2. This work demonstrates a physical and versatile approach of electrode surface patterning to boost electrocatalytic fuel generation performance and can be applied to any metal and semiconductor catalysts for a range of electrochemical reactions.
electric field localization hotspot formation laser-induced periodic surface structures electrochemical fuel generation overall water splitting 
Opto-Electronic Advances
2022, 5(11): 210105
作者单位
摘要
南京理工大学 电子工程与光电技术学院,江苏 南京 210094
采用波长为355 nm、脉宽为7 ns、重复频率为1 Hz的线性偏振激光在聚酰亚胺薄膜表面制备了微米量级的周期性表面结构,并讨论了激光参数对条纹形貌的影响。实验发现,周期性结构的产生存在一定的能量密度阈值和脉冲个数阈值,当激光能量密度范围在54~586 mJ/cm²,脉冲个数在1~50时,能在聚合物薄膜表面产生周期为4~6.65 μm的规整条纹结构。在保持激光能量密度不变的情况下,增加脉冲个数,或者保持脉冲个数不变,增大入射到材料表面的激光能量密度,都能引起条纹周期增大,并且根据实验结果,随着脉冲个数的增加,烧蚀坑的深度增加,LIPSS能持续出现在坑底。此外,为分析周期性结构形成的可能原因,通过对热传导模型的建立讨论了当周期性结构形成时材料历经的物理状态。文中的相关研究结果对基于LIPSS实现的材料表面润湿性、摩擦力学、光学特性的改善提供了一定的研究基础。
激光诱导表面周期性结构 聚合物薄膜 纳秒激光 表面改性 laser-induced periodic surface structures (LIPSS) polymer film nanosecond laser surface modification 
红外与激光工程
2022, 51(2): 20210911
Author Affiliations
Abstract
1 Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China
2 Han’s Laser Technology Industry Group Co., Ltd., Shenzhen 518126, China
In this work, we used femtosecond laser double-pulse trains to produce laser-induced periodic surface structures (LIPSS) on 304 stainless steel. Surprisingly, a novel type of periodic structure was discovered, which, to the best of our knowledge, is the first in literature. We surmised that the cause for this novel LIPSS was related to the weak energy coupling of subpulses when the intrapulse delay was longer than the thermal relaxation time of stainless steel. Furthermore, we found that the fluence combination and arrival sequence of subpulses in a double-pulse train also influenced LIPSS morphology.
femtosecond laser laser-induced periodic surface structures morphology stainless steel 
Chinese Optics Letters
2021, 19(12): 123801
王田宇 1,2李欣 1,2,*卞进田 1,2,**孙晓泉 1,2,***
作者单位
摘要
1 国防科技大学脉冲功率激光技术国家重点实验室,安徽 合肥 230037
2 国防科技大学先进激光技术安徽省重点实验室,安徽 合肥 230037
激光诱导表面周期性结构(LIPSS)是固体材料的一种普遍特性。材料表面的LIPSS可以改变材料的性质,利用这些特性可以实现许多特殊功能。本文总结近年来关于LIPSS的代表性文章,首先以激光作用下表面能量排布和物质流动方式作为切入点,从理论上解释LIPSS的形成原理;然后阐述薄膜表面与刻蚀材料表面上形成LIPSS的研究工作,以及激光参数对形成LIPSS的影响;最后介绍LIPSS在现代工业中,如制备特殊晶体、超亲水/疏水材料和医学材料等方面的应用情况。本文从以上三个方面对近年来LIPSS相关领域的研究进行了梳理和归纳,对LIPSS相关技术在未来的发展进行展望。
材料 激光损伤 激光诱导表面周期性结构 激光加工 纳米图形制造 
激光与光电子学进展
2021, 58(7): 0700007
王田宇 1,2卞进田 1,2,*李欣 1,2,*孔辉 1,2孙晓泉 1,2,*
作者单位
摘要
1 国防科技大学脉冲功率激光技术国家重点实验室, 安徽 合肥 230037
2 国防科技大学先进激光技术安徽省重点实验室, 安徽 合肥 230037
金属铜在中红外波段的发射率极低,所以铜薄膜是一种性能优异且对抗被动式中红外热探测器隐身的材料,而在铜薄膜表面使用激光诱导表面周期性结构(LIPSS)可以显著提高其在中红外波段的发射率。首先使用双温方程模型模拟LIPSS形成过程中材料软化的过程,然后使用波长为1064 nm的偏振脉冲激光在融石英基底上的铜薄膜表面诱导产生周期为波长量级的LIPSS,最后基于实验产生的铜薄膜LIPSS搭建仿真模型并对其在近红外和中红外波段的发射率进行分析。模拟结果表明,铜薄膜LIPSS的产生可以显著提高其在中红外波段的发射率,该方法可以实现铜薄膜对被动式中红外热探测器的隐身。
激光光学 激光损伤 激光诱导表面周期性结构 中红外激光 发射率 反隐身 
中国激光
2021, 48(4): 0401017

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