强激光与粒子束
2023, 35(12): 124006
1 光电材料与技术国家重点实验室,中山大学物理与天文学院,中山大学物理学院,广东 广州 510275
2 汕头大学理学院物理系,广东 汕头 515063
人类社会正处于信息爆炸的大数据时代,迅速膨胀的数据在持续高速增加,需要越来越大的存储容量来承载。高密度光存储技术具有非接触、抗电磁干扰、存储密度高等优点,为更好地存储、处理、分析每天产生的海量数据提供了优质方案。然而,光储存记录点的尺寸受到衍射极限的限制,传统光存储技术的存储密度难以大幅提升。近年来,随着多参量光场调控技术的发展,高数值孔径物镜聚焦下的结构化光场有了更新颖的结构、更丰富的维度和更小的尺寸,为高密度光存储提供了更多选择。本文将综述光场调控技术在紧聚焦焦场上的最新成果,介绍实现空间紧聚焦焦场的理论设计、模拟、实验、高效生成器件和应用。这些成果将会更好地服务于高密度光存储技术的研究与应用。
光数据存储 衍射极限 光场调控 紧聚焦 光学超振荡 超构透镜 中国激光
2023, 50(18): 1813012
1 暨南大学 光子技术研究院 广东省光纤传感与通信技术重点实验室,广东 广州 511443
2 中国科学院理化技术研究所 仿生智能界面科学中心 有机纳米光子学实验室,北京 100190
Overview: Femtosecond laser two-photon polymerization (TPP) micro-nanofabrication technology is a new type of three-dimensional lithography technology that integrates nonlinear optics, ultra-fast pulsed laser, microscopic imaging, ultra-high-precision positioning, three-dimensional (3D) graphics CAD modeling, and photochemical materials. It has the characteristics of simplicity, low cost, high resolution, true 3D, and so on. Different from the technical route of shortening the wavelength of the traditional lithography, this TPP technology breaks through the optical diffraction limit using the ultrafast laser in the near-infrared and the nonlinear optical effect of the interaction between the laser and the material. TPP can achieve true 3D fabrication of complex 3D structures. After the femtosecond pulse laser is tightly focused in space, photopolymerization is initiated by the two-photon absorption(TPA), which can limit the fabrication area in the center of the focus. The interaction time of the ultrashort pulse with the material is much lower than the thermal relaxation of the material, avoiding the photothermal effect. The lateral linewidth can be reduced to about 100 nm due to the strong threshold characteristics of the two-photon absorption process. Thus, TPP is an ideal fabrication method in the field of 3D micro-nanostructure. Since 2001, Kawata’s team has used a near-infrared femtosecond laser with a wavelength of 780 nm to fabricate a "nanobull" with the size of red blood cells. It fully demonstrated the advantages of TPP in the preparation of three-dimensional micro-nano structures. At the same time, a polymer nanodot with a size of 120 nm was fabricated, which was only 1/7 of the laser wavelength, breaking the optical diffraction limit in this study. Since then, scientists from various countries have improved the line width, resolution, and other parameters of 3D structure by continuously improving the materials, structure, processing technology and light field control, and other aspects. At the same time, with the continuous development and improvement of the 3D nanostructure fabrication technology, the advantages of TPP technology are also reflected in some application fields, such as micro-optical devices, integrated optical devices, micro-electromechanical systems, and biomedical devices. This paper will systematically introduce the femtosecond laser TPP micro-nanofabrication technology, including the fabricating principle, the development of fabricating methods, and its research overview in many application fields. Finally, its existing problems and future development and application prospects are discussed.
飞秒激光 双光子聚合 光学衍射极限 加工分辨力 加工效率 femtosecond laser two-photon polymerization optical diffraction limit resolution efficiency
1 南京理工大学 电子工程与光电技术学院,南京 210094
2 上海市计量测试技术研究院,上海 201203
3 中国电子科技集团公司第十三研究所,石家庄 050051
从显微成像测量线宽的理论模型出发,分析了限制测量精度的边缘定位误差因素,基于阶跃边缘衍射光强微分的灵敏探测原理,提出一种平移差分的微结构线宽显微测量方法,即使用压电陶瓷微位移平台微量移动待测微结构沟槽,两步平移并采集三幅对沟槽清晰成像的显微图像,显微图像依次相减得到两幅差分图,将线宽测量转为差分脉冲距离测量,利用差分脉冲在阶跃边缘附近梯度变化灵敏度高的特点,突破衍射极限,提高线宽测量精度;再用纳米精度压电陶瓷位移台标定与显微成像系统有关的倍率测量常数,以压电陶瓷位移台的高精度保证测量结果的准确性。以可溯源计量部门、线宽为30.00 μm的标准沟槽样板作为待测样品,10次测量得到线宽测量平均值30.03 μm,标准差0.005 μm,并对本方法进行了不确定度分析,最终得到合成不确定度为0.37%()。
线宽测量 光学显微 平移差分 测量精度 衍射极限 Linewidth measurement Optical microscopy Translation difference Precision Diffraction limit
强激光与粒子束
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强激光与粒子束
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